| RE49297 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Ruud Hendricus Martinus Johannes Bloks +2 more |
2022-11-15 |
| 10429741 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2019-10-01 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2019-04-23 |
| 10191377 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Ruud Hendricus Martinus Johannes Bloks +2 more |
2019-01-29 |
| 10151984 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2018-12-11 |
| 10146139 |
Lithographic apparatus and a method of operating the apparatus |
Ivo Adam Johannes Thomas, Siebe Landheer, Arnout Johannes Meester, Gheorghe Tanasa |
2018-12-04 |
| 9709901 |
Lithographic apparatus and a method of operating the apparatus |
Ivo Adam Johannes Thomas, Siebe Landheer, Arnout Johannes Meester, Gheorghe Tanasa |
2017-07-18 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2017-05-09 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2017-04-11 |
| 9176371 |
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2015-11-03 |
| 8928857 |
Lithographic apparatus and method of operating the apparatus |
Ivo Adam Johannes Thomas, Siebe Landheer, Arnout Johannes Meester, Gheorghe Tanasa |
2015-01-06 |
| 8797504 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +9 more |
2014-08-05 |
| 8730447 |
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Arnout Johannes Meester +3 more |
2014-05-20 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot +11 more |
2014-05-20 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-03-25 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2013-06-25 |
| 8462313 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Gerardus Adrianus Antonius Maria Kusters +1 more |
2013-06-11 |
| 8451423 |
Lithographic apparatus and method |
Franciscus Johannes Joseph Janssen, Siebe Landheer, Yücel Kök, Marcel Beckers, Ivo Adam Johannes Thomas |
2013-05-28 |