| RE49297 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2022-11-15 |
| RE48668 |
Temperature sensing probe, burl plate, lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Johan Gertrudis Cornelis Kunnen, Sander Catharina Reinier Derks |
2021-08-03 |
| 10591828 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2020-03-17 |
| 10203611 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2019-02-12 |
| 10191377 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2019-01-29 |
| 9823589 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2017-11-21 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2017-04-11 |
| 9298107 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2016-03-29 |
| 9141005 |
Temperature sensing probe, burl plate, lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Johan Gertrudis Cornelis Kunnen, Sander Catharina Reinier Derks |
2015-09-22 |
| 8941815 |
Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Jozef Petrus Henricus Benschop, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Alexander Nikolov Zdravkov +2 more |
2015-01-27 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens +7 more |
2014-12-16 |
| 8462313 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Marcio Alexandre Cano Miranda +1 more |
2013-06-11 |