| 12346032 |
System, lithographic apparatus and method |
Rob Johan Theodoor Rutten, Alexandrios Mathew, Ron Vennix |
2025-07-01 |
| 11846879 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen |
2023-12-19 |
| 11774869 |
Method and system for determining overlay |
Hendrik Cornelis Anton Borger, Frederik Eduard De Jong, Johan Gertrudis Cornelis Kunnen, Siebe Landheer, Chung-Hsun Li +3 more |
2023-10-03 |
| 11500296 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen |
2022-11-15 |
| RE49142 |
Lithographic apparatus and an object positioning system |
Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more |
2022-07-19 |
| 11300890 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2022-04-12 |
| 11175594 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Thibault Simon Mathieu Laurent, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen |
2021-11-16 |
| 10990025 |
Patterning device cooling apparatus |
Laurentius Johannes Adrianus Van Bokhoven, Günes NAKIBOGLU, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen |
2021-04-27 |
| 10788763 |
Lithographic apparatus |
Jan Steven Christiaan Westerlaken, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more |
2020-09-29 |
| 10642166 |
Patterning device cooling apparatus |
Güneş Nakibo{hacek over (g)}lu, Lowell Lane Baker, Hakki Ergün Cekli, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more |
2020-05-05 |
| 10591828 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more |
2020-03-17 |
| 10534271 |
Lithography apparatus and a method of manufacturing a device |
Pieter Jeroen Johan Emanuel Hoefnagels, Ronald Frank KOX, John Maria Bombeeck, Johannes Cornelis Paulus Melman, Patricius Jacobus Neefs |
2020-01-14 |
| 10520837 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2019-12-31 |
| 10508896 |
Measurement substrate and a measurement method |
Stoyan Nihtianov, Johannes Paul Marie De La Rosette, Thibault Simon Mathieu Laurent, Kofi Afolabi Anthony Makinwa, Patricius Jacobus Neefs +1 more |
2019-12-17 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2019-11-19 |
| 10394139 |
Patterning device cooling apparatus |
Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Hakki Ergün Cekli, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more |
2019-08-27 |
| 10222713 |
Patterning device cooling apparatus |
Laurentius Johannes Adrianus Van Bokhoven, Günes NAKIBOGLU, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen |
2019-03-05 |
| 10203611 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more |
2019-02-12 |
| 9939738 |
Lithographic apparatus and an object positioning system |
Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more |
2018-04-10 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2018-03-13 |
| 9904177 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Thibault Simon Mathieu Laurent, Gregory Martin Mason Corcoran +2 more |
2018-02-27 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2018-02-20 |
| 9823589 |
Lithographic apparatus and method |
Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more |
2017-11-21 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2017-10-10 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda +2 more |
2017-04-11 |