Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513568 | Lithographic apparatus | Jan Steven Christiaan Westerlaken, Peter A. Delmastro, Thibault Simon Mathieu Laurent, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more | 2016-12-06 |
| 9298107 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more | 2016-03-29 |
| 8472003 | Fluid handling structure, lithographic apparatus and device manufacturing method | Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more | 2013-06-25 |