| 12072636 |
Fluid handling system and lithographic apparatus |
Theodorus Wilhelmus Polet, Koen Steffens, Gerben Pieterse, Erik Henricus Egidius Catharina Eummelen, Francis Fahrni |
2024-08-27 |
| 11300890 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ivo Adam Johannes Thomas, Martijn Houben +7 more |
2022-04-12 |
| 10916453 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method |
Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Francis Fahrni, Ruud Olieslagers +5 more |
2021-02-09 |
| 10859919 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo +3 more |
2020-12-08 |
| 10551748 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Walter Theodorus Matheus STALS, David Bessems, Giovanni Luca Gattobigio, Victor Manuel Blanco Carballo +3 more |
2020-02-04 |
| 10520837 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ivo Adam Johannes Thomas, Martijn Houben +7 more |
2019-12-31 |
| 10409174 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method |
Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Francis Fahrni, Ruud Olieslagers +5 more |
2019-09-10 |
| 10324384 |
Lithographic apparatus and a method of manufacturing a lithographic apparatus |
Gerben Pieterse, Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Theodorus Marinus Modderman +3 more |
2019-06-18 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2019-04-23 |
| 10222707 |
Lithographic apparatus and a device manufacturing method |
Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2019-03-05 |
| 10001712 |
Immersion lithographic apparatus and device manufacturing method |
Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman +3 more |
2018-06-19 |
| 9904177 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Thibault Simon Mathieu Laurent, Gregory Martin Mason Corcoran, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2018-02-27 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ivo Adam Johannes Thomas, Martijn Houben +7 more |
2018-02-20 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2017-05-09 |
| 9274436 |
Lithographic apparatus and a device manufacturing method |
Theodorus Wilhelmus Polet, Henrikus Herman Marie Cox, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2016-03-01 |
| 9195147 |
Lithographic apparatus and device manufacturing method involving a seal between a table and a component |
Koen Steffens, Erik Henricus Egidius Catharina Eummelen |
2015-11-24 |
| 8711326 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Richard Moerman, Michel Riepen, Sergei Shulepov +8 more |
2014-04-29 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-03-25 |
| 8675169 |
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Frank Johannes Jacobus Van Boxtel, Marinus Johannes Maria Van Dam, Johannes Christiaan Maria Jasper, Sergei Shulepov, Gerben Pieterse +3 more |
2014-03-18 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2013-06-25 |
| 8441610 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
Tjarko Adriaan Rudolf Van Empel, Herman Vogel, Niek Jacobus Johannes Roset |
2013-05-14 |
| 8279396 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Willem Jurrianus Venema |
2012-10-02 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Wilhelmus Franciscus Johannes Simons, Danny Maria Hubertus Philips +5 more |
2012-09-04 |
| 8218126 |
Lithographic apparatus and device manufacturing method |
Koen Steffens, Paulus Martinus Maria Liebregts, Daniel Jozef Maria Direcks, Gert-Jan Gerardus Johannes Thomas Brands |
2012-07-10 |