| 11300890 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Martijn Houben +7 more |
2022-04-12 |
| 10520837 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Martijn Houben +7 more |
2019-12-31 |
| 10429741 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2019-10-01 |
| 10151984 |
Lithographic apparatus and a method of operating the apparatus |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2018-12-11 |
| 10146139 |
Lithographic apparatus and a method of operating the apparatus |
Siebe Landheer, Arnout Johannes Meester, Marcio Alexandre Cano Miranda, Gheorghe Tanasa |
2018-12-04 |
| 10088755 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Franciscus Johannes Joseph Janssen |
2018-10-02 |
| 9904177 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Thibault Simon Mathieu Laurent, Gregory Martin Mason Corcoran, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2018-02-27 |
| 9897928 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Martijn Houben +7 more |
2018-02-20 |
| 9715179 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Franciscus Johannes Joseph Janssen |
2017-07-25 |
| 9709901 |
Lithographic apparatus and a method of operating the apparatus |
Siebe Landheer, Arnout Johannes Meester, Marcio Alexandre Cano Miranda, Gheorghe Tanasa |
2017-07-18 |
| 9182678 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Franciscus Johannes Joseph Janssen |
2015-11-10 |
| 9176371 |
Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma +6 more |
2015-11-03 |
| 8928857 |
Lithographic apparatus and method of operating the apparatus |
Siebe Landheer, Arnout Johannes Meester, Marcio Alexandre Cano Miranda, Gheorghe Tanasa |
2015-01-06 |
| 8730447 |
Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure |
Jeroen Peter Johannes Bruijstens, Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Arnout Johannes Meester +3 more |
2014-05-20 |
| 8462313 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Peter Johannes Bruijstens, Gerardus Adrianus Antonius Maria Kusters, Marcio Alexandre Cano Miranda +1 more |
2013-06-11 |
| 8462314 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Marcus Adrianus Van De Kerkhof, Siebe Landheer, Wouterus Johannes Petrus Maria Maas, Jeroen Peter Johannes Bruijstens +2 more |
2013-06-11 |
| 8451423 |
Lithographic apparatus and method |
Franciscus Johannes Joseph Janssen, Siebe Landheer, Yücel Kök, Marcel Beckers, Marcio Alexandre Cano Miranda |
2013-05-28 |
| 8233134 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Franciscus Johannes Joseph Janssen |
2012-07-31 |
| 7518703 |
Lithographic apparatus and method |
Marcus Adrianus Van De Kerkhof |
2009-04-14 |