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Lithographic apparatus and a method of operating the apparatus |
Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma, Arnout Johannes Meester +6 more |
2019-10-01 |
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Lithographic apparatus and a method of operating the apparatus |
Richard Joseph Bruls, Hans Jansen, Siebe Landheer, Laurentius Catrinus Jorritsma, Arnout Johannes Meester +6 more |
2018-12-11 |
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Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen |
2018-10-02 |
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Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen |
2017-07-25 |
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Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen |
2015-11-10 |
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Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure |
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2015-11-03 |
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Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure |
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2014-05-20 |
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Lithographic apparatus and device manufacturing method |
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2013-06-11 |
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Lithographic apparatus and device manufacturing method |
Marcel Beckers, Marcus Adrianus Van De Kerkhof, Siebe Landheer, Wouterus Johannes Petrus Maria Maas, Ivo Adam Johannes Thomas +2 more |
2013-06-11 |
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Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Franciscus Johannes Joseph Janssen, Ivo Adam Johannes Thomas |
2012-07-31 |