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Lithography apparatus and a method of manufacturing a device |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more |
2025-03-04 |
| 11774857 |
Lithography apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more |
2023-10-03 |
| 11614689 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Miao Yu, Cornelius Maria Rops +4 more |
2023-03-28 |
| 11372336 |
Lithography apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more |
2022-06-28 |
| 11231653 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Miao Yu, Cornelius Maria Rops +4 more |
2022-01-25 |
| 11086239 |
Cleaning device and method of cleaning |
Miao Yu, Petrus Martinus Gerardus Johannes Arts, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Maarten Holtrust +3 more |
2021-08-10 |
| 10969695 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Miao Yu, Cornelius Maria Rops +4 more |
2021-04-06 |
| 10481502 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2019-11-19 |
| 10416571 |
Fluid handling structure and lithographic apparatus |
Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Miao Yu, Cornelius Maria Rops +4 more |
2019-09-17 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2019-04-23 |
| 10001712 |
Immersion lithographic apparatus and device manufacturing method |
Theodorus Wilhelmus Polet, Johannes Jacobus Matheus Baselmans, Willem Jan Bouman, Theodorus Marinus Modderman, Cornelius Maria Rops +3 more |
2018-06-19 |
| 9915877 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2018-03-13 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre +8 more |
2017-10-10 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2017-05-09 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-03-25 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-01-21 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2013-06-25 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +5 more |
2012-09-04 |