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Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method |
Maarten Hartger Kimman, Dave Braaksma, Peter Michel Silvester Maria Heijmans |
2023-12-05 |
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Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method |
Maarten Hartger Kimman, Dave Braaksma, Peter Michel Silvester Maria Heijmans |
2022-04-12 |
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Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness |
Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria ROVERS +2 more |
2021-06-08 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2021-05-25 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +15 more |
2021-03-30 |
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Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2020-08-18 |
| 10747127 |
Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more |
2020-08-18 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2020-08-11 |
| 10705432 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2020-07-07 |
| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Nicolaas Ten Kate +12 more |
2020-07-07 |
| 10684554 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2020-06-16 |
| 10678139 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2020-06-09 |
| 10620545 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2020-04-14 |
| 10599054 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Nicolaas Ten Kate +8 more |
2020-03-24 |
| 10527955 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2020-01-07 |
| 10509326 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2019-12-17 |
| 10503084 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +15 more |
2019-12-10 |
| 10495984 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2019-12-03 |
| 10488759 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2019-11-26 |
| 10466595 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2019-11-05 |
| 10451973 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2019-10-22 |
| 10353296 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2019-07-16 |
| 10345711 |
Substrate placement in immersion lithography |
Gerrit Johannes Nijmeijer, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2019-07-09 |
| 10345712 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2019-07-09 |
| 10338478 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2019-07-02 |