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Lithographic apparatus and device manufacturing method |
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2019-06-25 |
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Lithographic apparatus and device manufacturing method |
Michel Riepen, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2019-04-23 |
| 10261428 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +12 more |
2019-04-16 |
| 10248034 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2019-04-02 |
| 10248033 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2019-04-02 |
| 10234768 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2019-03-19 |
| 10222706 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2019-03-05 |
| 10209629 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2019-02-19 |
| 10209634 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Maurice Willem Jozef Etiënne Wijckmans, Engelbertus Antonius Fransiscus Van Der Pasch, Bernardus Antonius Johannes Luttikhuis |
2019-02-19 |
| 10139735 |
Lithographic apparatus and method |
Johannes Jacobus Matheus Baselmans, Hans Butler, Sander Kerssemakers, Bart Smeets, Robertus Nicodemus Jacobus Van Ballegoij +1 more |
2018-11-27 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2018-11-06 |
| 10088756 |
Lithographic apparatus and method |
Sander Kerssemakers, Wilhelmus Petrus De Boeij, Gerben Frank DE LANGE, Petrus Franciscus Van Gils, Jelmer Mattheüs KAMMINGA +2 more |
2018-10-02 |
| 10025196 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2018-07-17 |
| 9989861 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2018-06-05 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2018-04-24 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Nicolaas Ten Kate +12 more |
2018-02-27 |
| 9885965 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2018-02-06 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2018-01-02 |
| 9829799 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2017-11-28 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2017-10-24 |
| 9766556 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Sergei Shulepov |
2017-09-19 |
| 9753381 |
Substrate table system, lithographic apparatus and substrate table swapping method |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Erik Roelof Loopstra, Hans Butler |
2017-09-05 |
| 9753380 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2017-09-05 |
| 9746788 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Nicolaas Ten Kate +8 more |
2017-08-29 |
| 9740106 |
Substrate placement in immersion lithography |
Gerrit Johannes Nijmeijer, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2017-08-22 |