| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2015-09-15 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens, Marc Wilhelmus Maria Van Der Wijst +4 more |
2015-09-01 |
| 9104117 |
Lithographic apparatus having a liquid detection system |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2015-08-11 |
| 9097987 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2015-08-04 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Nicolaas Ten Kate +12 more |
2015-08-04 |
| 9099501 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Sergei Shulepov |
2015-08-04 |
| 9091940 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
Antonius Theodorus Anna Maria Derksen, Aleksey Yurievich Kolesnychenko, Joeri Lof, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2015-07-28 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 9081300 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2015-07-14 |
| 8988651 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-24 |
| 8976334 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-10 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2015-01-27 |
| 8937704 |
Lithographic apparatus and device manufacturing method involving a resistivity sensor |
Jeroen Johannes Sophia Maria Mertens, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor, Sjoerd Nicolaas Lambertus Donders +1 more |
2015-01-20 |
| 8934082 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2015-01-13 |
| 8860924 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2014-10-14 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-10-14 |
| 8860922 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Bob Streefkerk, Bernhard Gellrich, Andreas Wurmbrand |
2014-10-14 |
| 8810771 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Bob Streefkerk, Bernhard Gellrich, Andreas Wurmbrand |
2014-08-19 |
| 8797503 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2014-08-05 |
| 8773641 |
Leaf spring, stage system, and lithographic apparatus |
Martinus Agnes Willem Cuijpers, Bart Friso Riedstra, Ronald Cornelis Gerardus Gijzen, Maikel Cornelis Andreas Bruin |
2014-07-08 |
| 8760621 |
Lithographic apparatus and method |
Franciscus Johannes Joseph Janssen |
2014-06-24 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Nicolaas Ten Kate +8 more |
2014-06-17 |
| 8755033 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-06-17 |