| 11327404 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders |
2022-05-10 |
| 11016394 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2021-05-25 |
| 10962891 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +15 more |
2021-03-30 |
| 10761438 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2020-09-01 |
| 10739684 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2020-08-11 |
| 10705432 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2020-07-07 |
| 10684554 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2020-06-16 |
| 10678139 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2020-06-09 |
| 10656538 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2020-05-19 |
| 10620545 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2020-04-14 |
| 10527955 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2020-01-07 |
| 10509326 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2019-12-17 |
| 10503084 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +15 more |
2019-12-10 |
| 10495981 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2019-12-03 |
| 10495980 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2019-12-03 |
| 10488759 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2019-11-26 |
| 10466595 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2019-11-05 |
| 10451973 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2019-10-22 |
| 10386725 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders |
2019-08-20 |
| 10353296 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2019-07-16 |
| 10345712 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2019-07-09 |
| 10338478 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2019-07-02 |
| 10261428 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2019-04-16 |
| 10248027 |
Projection system |
Hans Butler, Raoul Maarten Simon Knops, Christiaan Louis Valentin, Jan Bernard Plechelmus Van Schoot, Wilhelmus Franciscus Johannes Simons +4 more |
2019-04-02 |
| 10248034 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2019-04-02 |