| 10234768 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2019-03-19 |
| 10222706 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2019-03-05 |
| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2019-01-15 |
| 10151989 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2018-12-11 |
| 10025196 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2018-07-17 |
| 9989861 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2018-06-05 |
| 9983489 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation |
Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets +3 more |
2018-05-29 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2018-04-24 |
| 9952514 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders |
2018-04-24 |
| 9885965 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2018-02-06 |
| 9829799 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2017-11-28 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2017-10-24 |
| 9733575 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2017-08-15 |
| 9703210 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-07-11 |
| 9623436 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2017-04-18 |
| 9606449 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2017-03-28 |
| 9588442 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2017-03-07 |
| 9581914 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2017-02-28 |
| 9568840 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2017-02-14 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra +8 more |
2016-11-01 |
| 9482962 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2016-10-25 |
| 9477159 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2016-10-25 |
| 9477153 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2016-10-25 |