| 9383655 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2016-07-05 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2016-06-07 |
| 9285686 |
Lithographic apparatus involving an immersion liquid supply system with an aperture |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2016-03-15 |
| 9285685 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graupner, Johannes Catharinus Hubertus Mulkens +1 more |
2016-03-15 |
| 9229335 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2016-01-05 |
| 9207543 |
Lithographic apparatus and device manufacturing method involving a groove to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2015-12-08 |
| 9182679 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bernhard Gellrich, Andreas Wurmbrand |
2015-11-10 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9146478 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2015-09-29 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9104117 |
Lithographic apparatus having a liquid detection system |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2015-08-11 |
| 9097987 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2015-08-04 |
| 9091940 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Joeri Lof, Erik Roelof Loopstra +7 more |
2015-07-28 |
| 9081300 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2015-07-14 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 9025127 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2015-05-05 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2015-02-24 |
| 8953144 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2015-02-10 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-01-27 |
| 8937704 |
Lithographic apparatus and device manufacturing method involving a resistivity sensor |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2015-01-20 |
| 8913223 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2014-12-16 |
| 8860922 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bernhard Gellrich, Andreas Wurmbrand |
2014-10-14 |
| 8860923 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-10-14 |
| 8860924 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2014-10-14 |