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Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more |
2019-03-05 |
| 9964853 |
Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method |
Peter Clement Paul Vanoppen, Eric Brouwer, Hugo Augustinus Joseph Cramer, Jan Hendrik Den Besten, Paul Christiaan Hinnen |
2018-05-08 |
| 9778575 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more |
2017-10-03 |
| 9285685 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jozef Maria Finders, Paul Graupner, Johannes Catharinus Hubertus Mulkens +1 more |
2016-03-15 |
| 9250536 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Greevenbroek, Patricius Aloysius Jacobus Tinnemans +2 more |
2016-02-02 |
| 8937706 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen |
2015-01-20 |
| 8711330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2014-04-29 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2011-06-14 |
| 7724351 |
Lithographic apparatus, device manufacturing method and exchangeable optical element |
Erik Roelof Loopstra, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg, Laurentius Catrinus Jorritsma +7 more |
2010-05-25 |
| 7352435 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2008-04-01 |
| 6809797 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes Jacobus Matheus Baselmans, Hugo Augustinus Joseph Cramer, Jozef Maria Finders, Carsten Kohler |
2004-10-26 |