Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222703 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more | 2019-03-05 |
| 9778575 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more | 2017-10-03 |
| 9645510 | Method of controlling a radiation source and lithographic apparatus comprising the radiation source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Frank Everts, Herman Philip Godfried +1 more | 2017-05-09 |
| 9250536 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Greevenbroek +2 more | 2016-02-02 |
| 9140999 | Reticle assembly, a lithographic apparatus, the use in a lithographic process, and a method to project two or more image fields in a single scanning movement of a lithographic process | — | 2015-09-22 |
| 8982319 | Lithographic apparatus and method | Roland Pieter Stolk | 2015-03-17 |
| 8937706 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek | 2015-01-20 |
| 8885144 | Illumination system and lithographic apparatus | Bert Claessens, Heine Melle Mulder, Wilfred Edward Endendijk, Willem Jan Bouman, Bert Pieter Van Drieënhuizen +3 more | 2014-11-11 |
| 8625199 | Pulse modifier with adjustable etendue | Adel Joobeur, Oscar Franciscus Jozephus Noordman, Arun Mahadevan Venkataraman | 2014-01-07 |
| 8432529 | Lithographic apparatus and monitoring method | Bert Claessens, Herman Philip Godfried | 2013-04-30 |
| 8004770 | Pulse modifier with adjustable etendue | Adel Joobeur, Oscar Franciscus Jozephus Noordman, Arun Mahadevan Venkataraman | 2011-08-23 |
| 7508487 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Willem Van Schaik, Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors +1 more | 2009-03-24 |
| 7476491 | Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby | Antonius Johannes Van Der Net, Yuri Johannes Gabriël Van De Vijver | 2009-01-13 |
| 7368732 | Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program | — | 2008-05-06 |
| 7315351 | Lithographic apparatus, device manufacturing method and device manufactured therewith | — | 2008-01-01 |
| 7297911 | Lithographic apparatus, illumination system, illumination controller and control method | Stefan Geerte Kruijswijk, Johannes Heintze | 2007-11-20 |
| 7283208 | Lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Roel De Jonge, Roland Pieter Stolk | 2007-10-16 |
| 7012265 | Lithographic apparatus, integrated circuit device manufacturing method, and integrated circuit device manufactured thereby | — | 2006-03-14 |
| 6989544 | Lithographic apparatus, device manufacturing method, device manufactured thereby, and computer program | — | 2006-01-24 |
| 6733165 | Optical integrator for an illumination device | Sijbe Abraham Van Der Lei, Marnix Aldert Tas, Jan Hoegee, Jess Koehler, Johannes Wangler | 2004-05-11 |
| 6700646 | Lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens | 2004-03-02 |
| 6583855 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Krikke, Markus Franciscus Antonius Eurlings, Jan Hoegee | 2003-06-24 |
| 6538716 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Willem Van Schaik | 2003-03-25 |
| 6473163 | Fluorescence radiation filter | Johannes Catharinus Hubertus Mulkens | 2002-10-29 |
| 6455862 | Lithographic projection apparatus | Oscar Franciscus Jozephus Noordman | 2002-09-24 |