Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7714983 | Illumination system for a microlithography projection exposure installation | Johannes Wangler, Markus Brotsack, Wolfgang Singer, Damian Fiolka, Manfred Maul | 2010-05-11 |
| 7583787 | Device for improving the resolution capability of an x-ray optical apparatus | Albrecht Frey, Norbert Pailer | 2009-09-01 |
| 7202467 | System for the optical detection of a distant object using a rotating mirror | Wolfgang Holota | 2007-04-10 |
| 7027235 | Optical system for providing a useful light beam influenced by polarization | — | 2006-04-11 |
| 6900946 | Zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system | — | 2005-05-31 |
| 6864960 | Zoom system for an illumination device | Johannes Wangler | 2005-03-08 |
| 6733165 | Optical integrator for an illumination device | Sijbe Abraham Van Der Lei, Marnix Aldert Tas, Jan Hoegee, Paul Van Der Veen, Johannes Wangler | 2004-05-11 |