Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958806 | Lithographic apparatus and device manufacturing method | Heine Melle Mulder, Armand Eugene Albert Koolen | 2005-10-25 |
| 6733165 | Optical integrator for an illumination device | Sijbe Abraham Van Der Lei, Marnix Aldert Tas, Paul Van Der Veen, Jess Koehler, Johannes Wangler | 2004-05-11 |
| 6583855 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Krikke, Markus Franciscus Antonius Eurlings, Paul Van Der Veen | 2003-06-24 |