Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030958 | Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method | Cornelis Petrus Luijkx, Vadim Yevgenyevich Banine, Hako Botma, Martinus Van Duijnhoven, Markus Franciscus Antonius Eurlings +3 more | 2006-04-18 |
| 6833907 | Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus | Markus Franciscus Antonius Eurlings | 2004-12-21 |
| 6671035 | Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus | Markus Franciscus Antonius Eurlings | 2003-12-30 |
| 6583855 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Markus Franciscus Antonius Eurlings, Jan Hoegee, Paul Van Der Veen | 2003-06-24 |