Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8094287 | Lithographic appararus and method | Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Yuri Johannes Gabriël Van De Vijver, Bernhard Gellrich, Bauke Jansen +1 more | 2012-01-10 |
| 7476491 | Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby | Paul Van Der Veen, Yuri Johannes Gabriël Van De Vijver | 2009-01-13 |
| 7450215 | Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system | Erik Johannus Josephus Van Bragt | 2008-11-11 |
| 7446849 | Lithographic apparatus and device manufacturing method | Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Yuri Johannes Gabriël Van De Vijver, Bernard Gellrich, Bauke Jansen +1 more | 2008-11-04 |
| 7384149 | Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system | Jeffrey J. Spiegelman, Johannus Josephus Van Bragt | 2008-06-10 |
| 7227612 | Lithographic apparatus and device manufacturing method | Tjarko Adriaan Rudolf Van Empel, Ronald Van Der Ham | 2007-06-05 |
| 7148949 | Lithographic apparatus and device manufacturing method | Franciscus Johannes Herman Maria Teunissen, Willem Lock | 2006-12-12 |
| 7113254 | Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system | Jeffrey J. Spiegelman, Erik Johannus Josephus Van Bragt | 2006-09-26 |
| 7057702 | Lithographic apparatus and device manufacturing method | Joeri Lof, Johannes Catharinus Hubertus Mulkens, Jeroen Johannes Sophia Maria Mertens, Ronald Van Der Ham, Nicolas Lallemant +1 more | 2006-06-06 |