Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7450215 | Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system | Antonius Johannes Van Der Net | 2008-11-11 |
| 7113254 | Lithographic projection apparatus, gas purging method, device manufacturing method, and purge gas supply system | Antonius Johannes Van Der Net, Jeffrey J. Spiegelman | 2006-09-26 |