Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428735 | Suppression of hydrogen degradation | Daniel Alvarez, Jr. | 2025-09-30 |
| 12057320 | Hydrogen peroxide plasma etch of ashable hard mask | — | 2024-08-06 |
| 11634815 | Method, system, and device for storage and delivery of process gas from a substrate | Richard D. Blethen, Russell J. Holmes, Daniel Alvarez, Jr., Jian Yang, Ericca Lynne Speed | 2023-04-25 |
| 11635170 | Method, system, and device for storage and delivery of process gas from a substrate | Richard D. Blethen, Russell J. Holmes, Daniel Alvarez, Jr., Jian Yang, Ericca Lynne Speed | 2023-04-25 |
| 11634816 | Method, system, and device for storage and delivery of process gas from a substrate | Richard D. Blethen, Russell J. Holmes, Daniel Alvarez, Jr., Jian Yang, Ericca Lynne Speed | 2023-04-25 |
| 11458412 | Controlled vapor delivery into low pressure processes | Zohreh Shamsi | 2022-10-04 |
| 11359292 | Suppression of hydrogen degradation | Daniel Alvarez, Jr. | 2022-06-14 |
| 11154792 | Methods and systems for generating process gases | Douglas Shepherd, Russell J. Holmes, Zohreh Shamsi | 2021-10-26 |
| 10994254 | System, device, and method for controlling mass flow of a catalytically reactive gas in a mixed gas stream | Russell J. Holmes, Christopher Ramos | 2021-05-04 |
| 10766771 | Methods and systems for purifying hydrogen peroxide solutions | Daniel Alvarez, Jr., Christopher Ramos | 2020-09-08 |
| 10363497 | Devices, systems, and methods for controlled delivery of process gases | Christopher Ramos | 2019-07-30 |
| 10214420 | Method, system, and device for delivery of process gas | Daniel Alvarez, Jr., Russell J. Holmes, Edward Heinlein, Christopher Ramos | 2019-02-26 |
| 10196685 | Methods and systems for delivering process gases to critical process applications | Daniel Alvarez, Jr., Russell J. Holmes, Edward Heinlein, Zohreh Shamsi, Christopher Ramos +2 more | 2019-02-05 |
| 10150048 | Method, system, and device for delivery of process gas | Daniel Alvarez, Jr., Russell J. Holmes, Edward Heinlein, Christopher Ramos, Jeremiah Trammel | 2018-12-11 |
| 9932630 | Method and system for decontaminating materials | Daniel Alvarez, Jr., Russell J. Holmes, James Hogan | 2018-04-03 |
| 9610550 | Method of delivering a process gas from a multi-component solution | Daniel Alvarez, Jr., Russell J. Holmes, Edward Heinlein, Zohreh Shamsi | 2017-04-04 |
| 9545585 | Method, system, and device for delivery of high purity hydrogen peroxide | Daniel Alvarez, Jr., Edward Heinlein, Russell J. Holmes | 2017-01-17 |
| 9410191 | Method and system for decontaminating materials | Daniel Alvarez, Jr., Russell J. Holmes, James Hogan | 2016-08-09 |
| 8926731 | Methods and devices for producing high purity steam | Richard D. Blethen | 2015-01-06 |
| 8664004 | Method for analysis of contaminants in a process fluid stream | Daniel Alvarez, Jr., Allan Tram | 2014-03-04 |
| 8518150 | Method of producing high purity steam | Richard D. Blethen | 2013-08-27 |
| 8282708 | Method of producing high purity steam | Richard D. Blethen | 2012-10-09 |
| 8075704 | Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures | Daniel Alvarez, Jr., Russell J. Holmes, Allan Tram | 2011-12-13 |
| 7879137 | Lithographic projection apparatus, purge gas supply system and gas purging method | Bipin Parekh, Robert S. Zeller, Russell J. Holmes | 2011-02-01 |
| 7824628 | Self-regenerative process for contaminant removal from ammonia | Daniel Alvarez, Jr. | 2010-11-02 |