| 11686951 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Joshua Jon Thornes, Brian Edward King |
2023-06-27 |
| 11287743 |
Control system and method |
Herman Philip Godfried, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT |
2022-03-29 |
| 11054665 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Joshua Jon Thornes, Brian Edward King |
2021-07-06 |
| 11050213 |
Online calibration for repetition rate dependent performance variables |
Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Herman Philip Godfried, Russell Allen Burdt |
2021-06-29 |
| 10727642 |
Online calibration for repetition rate dependent performance variables |
Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Herman Philip Godfried, Russell Allen Burdt |
2020-07-28 |
| 10627724 |
Lithographic apparatus and method |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Joshua Jon Thornes, Kevin M. O'Brien, Leon Pieter Paul Saanen +1 more |
2020-04-21 |
| 10451890 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Joshua Jon Thornes, Brian Edward King |
2019-10-22 |
| 9762023 |
Online calibration for repetition rate dependent performance variables |
Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Herman Philip Godfried, Russell Allen Burdt |
2017-09-12 |
| 9645510 |
Method of controlling a radiation source and lithographic apparatus comprising the radiation source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Herman Philip Godfried, Roland Pieter Stolk +1 more |
2017-05-09 |