Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360466 | Maintenance of modules for light sources used in semiconductor photolithography | Kumar Raja Guvindan Raju, Matthew Minakais, David Wesley Manley | 2025-07-15 |
| 12169363 | Radiation source testing | Thomas Patrick Duffey | 2024-12-17 |
| 12007696 | Burst statistics data aggregation filter | Matthew Minakais | 2024-06-11 |
| 11860036 | Determination of measurement error in an etalon | John T. Melchior, Kuo-Tai Teng | 2024-01-02 |
| 11050213 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried | 2021-06-29 |
| 10727642 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried | 2020-07-28 |
| 9762023 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried | 2017-09-12 |