| 12374853 |
Control system for a plurality of deep ultraviolet optical oscillators |
Yingbo Zhao, Walter Dale Gillespie, Joshua Jon Thornes, Eric Anders Mason |
2025-07-29 |
|
| 12169363 |
Radiation source testing |
Russell Allen Burdt |
2024-12-17 |
|
| 11777271 |
Method of and apparatus for extending electrode life in a laser chamber |
Paul C. Melcher, Walter Dale Gillespie |
2023-10-03 |
|
| 11768438 |
Spectral feature selection and pulse timing control of a pulsed light beam |
Kevin M. O'Brien, Joshua Jon Thornes |
2023-09-26 |
|
| 11686951 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2023-06-27 |
|
| 11526083 |
Spectral feature selection and pulse timing control of a pulsed light beam |
Kevin M. O'Brien, Joshua Jon Thornes |
2022-12-13 |
|
| 11054665 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2021-07-06 |
|
| 10852227 |
Apparatus for and method of sensing fluorine concentration |
— |
2020-12-01 |
|
| 10845711 |
Lithography optics adjustment and monitoring |
Thomas F. A. Bibby, Omar Zurita, Abhishek Subramanian |
2020-11-24 |
|
| 10451890 |
Reducing speckle in an excimer light source |
Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King |
2019-10-22 |
$2,042,000 |
| 10345714 |
Lithography optics adjustment and monitoring |
Thomas F. A. Bibby, Omar Zurita, Abhishek Subramanian |
2019-07-09 |
|
| 10288484 |
Homogenization of light beam for spectral feature metrology |
Zhongquan Zhao, Brian Edward King |
2019-05-14 |
|
| 10267687 |
Adjusting an amount of coherence of a light beam |
Thomas F. A. Bibby, Joshua Jon Thornes, Rostislav Rokitski |
2019-04-23 |
|
| 10228322 |
Apparatus for and method of sensing fluorine concentration |
— |
2019-03-12 |
|
| 10096967 |
Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source |
Rahul Ahlawat |
2018-10-09 |
|
| 10074953 |
Erosion resistant electrodes for use in generating gas discharge laser |
Siqi Luo, Richard C. Ujazdowski, Walter Dale Gillespie |
2018-09-11 |
|
| 10012544 |
Homogenization of light beam for spectral feature metrology |
Zhongquan Zhao, Brian Edward King |
2018-07-03 |
|
| 9945730 |
Adjusting an amount of coherence of a light beam |
Thomas F. A. Bibby, Joshua Jon Thornes, Rostislav Rokitski |
2018-04-17 |
|
| 9599510 |
Estimation of spectral feature of pulsed light beam |
Herman Philip Godfried |
2017-03-21 |
|
| 9246298 |
Corrosion resistant electrodes for laser chambers |
Janine Kardokus, William N. Partlo |
2016-01-26 |
|
| 8982922 |
Very high power laser chamber optical improvements |
Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel J. W. Brown, Slava Rokitski +5 more |
2015-03-17 |
|
| 8284815 |
Very high power laser chamber optical improvements |
Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel J. W. Brown, Slava Rokitski +5 more |
2012-10-09 |
$4,851,000 |
| 7995637 |
Gas discharge laser chamber |
Richard L. Sandstrom, William N. Partlo, Daniel J. W. Brown, Bryan Moosman, Tae Hoon Chung +2 more |
2011-08-09 |
$9,337,000 |
| 7535948 |
Cathodes for fluorine gas discharge lasers |
Thomas D. Steiger, Joshua Brown, Walter Dale Gillespie, Richard G. Morton |
2009-05-19 |
$8,145,000 |
| 7301980 |
Halogen gas discharge laser electrodes |
Thomas D. Steiger, Richard C. Ujazdowski, Timothy Dyer, Walter Dale Gillespie, Bryan Moosman +2 more |
2007-11-27 |
$9,510,000 |
