Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374853 | Control system for a plurality of deep ultraviolet optical oscillators | Yingbo Zhao, Walter Dale Gillespie, Thomas Patrick Duffey, Eric Anders Mason | 2025-07-29 |
| 12001144 | Forming multiple aerial images in a single lithography exposure pass | Willard E. Conley, Gregory Allen Rechtsteiner | 2024-06-04 |
| 11768438 | Spectral feature selection and pulse timing control of a pulsed light beam | Kevin M. O'Brien, Thomas Patrick Duffey | 2023-09-26 |
| 11754541 | Fluorine detection in a gas discharge light source | Rahul Ahlawat, Edward Siqi Luo, Gamaralalage G. Padmabandu | 2023-09-12 |
| 11747739 | Method and apparatus for imaging using narrowed bandwidth | Willard E. Conley, Duan-Fu Stephen Hsu | 2023-09-05 |
| 11686951 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Brian Edward King | 2023-06-27 |
| 11526082 | Forming multiple aerial images in a single lithography exposure pass | Willard E. Conley, Gregory Allen Rechtsteiner | 2022-12-13 |
| 11526083 | Spectral feature selection and pulse timing control of a pulsed light beam | Kevin M. O'Brien, Thomas Patrick Duffey | 2022-12-13 |
| 11054665 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Brian Edward King | 2021-07-06 |
| 11050213 | Online calibration for repetition rate dependent performance variables | Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2021-06-29 |
| 10727642 | Online calibration for repetition rate dependent performance variables | Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2020-07-28 |
| 10627724 | Lithographic apparatus and method | Frank Everts, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Kevin M. O'Brien, Leon Pieter Paul Saanen +1 more | 2020-04-21 |
| 10451890 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Brian Edward King | 2019-10-22 |
| 10267687 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Rostislav Rokitski, Thomas Patrick Duffey | 2019-04-23 |
| 10234769 | Monitoring system for an optical lithography system | Andrei Dorobantu, Kevin M. O'Brien, Matthew R. Graham | 2019-03-19 |
| 10095118 | Lithography optics adjustment and monitoring | Thomas F. A. Bibby, Khalid TAHBOUB, Donald James Haran, Rostislav Rokitski | 2018-10-09 |
| 9997888 | Control of a spectral feature of a pulsed light beam | Willard E. Conley, Eric Anders Mason | 2018-06-12 |
| 9945730 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Rostislav Rokitski, Thomas Patrick Duffey | 2018-04-17 |
| 9831628 | System and method for automatic gas optimization in a two-chamber gas discharge laser system | Kevin M. O'Brien, Michael Anthony Borrello | 2017-11-28 |
| 9778108 | Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam | — | 2017-10-03 |
| 9762023 | Online calibration for repetition rate dependent performance variables | Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2017-09-12 |
| 9130337 | System and method for automatic gas optimization in a two-chamber gas discharge laser system | Kevin M. O'Brien, Michael Anthony Borrello | 2015-09-08 |
| 8873600 | System and method for high accuracy gas refill in a two chamber gas discharge laser system | Rui Jiang, Daniel Jason Riggs, Kevin M. O'Brien | 2014-10-28 |
| 8411720 | System and method for automatic gas optimization in a two-chamber gas discharge laser system | Kevin M. O'Brien, Daniel Jason Riggs, Rui Jiang | 2013-04-02 |
| 8223298 | LCD based polarization, phase and amplitude spatial light modulator | Robin A. Reeder, Steven R. Wilkinson | 2012-07-17 |