Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298670 | Apparatus for and methods of combining multiple laser beams | Rabin Paudel, Eric Anders Mason, John T. Melchior | 2025-05-13 |
| 12253806 | Gas purge systems for a laser source | — | 2025-03-18 |
| 11754541 | Fluorine detection in a gas discharge light source | Joshua Jon Thornes, Rahul Ahlawat, Edward Siqi Luo | 2023-09-12 |
| 7079556 | Bandwidth control technique for a laser | Igor V. Fomenkov, Armen Kroyan, Jesse Buck, Palash P. Das, Richard L. Sandstrom +2 more | 2006-07-18 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6721340 | Bandwidth control technique for a laser | Igor V. Fomenkov, Armen Kroyan, Jesse Buck, Palash P. Das, Richard L. Sandstrom +2 more | 2004-04-13 |
| 6392743 | Control technique for microlithography lasers | Paolo Zambon, Tom A. Watson, Palash P. Das | 2002-05-21 |
| 6320892 | Energy efficient lithography laser | Palash P. Das, Tom A. Watson, Paolo Zambon | 2001-11-20 |
| 6128323 | Reliable modular production quality narrow-band high REP rate excimer laser | David W. Myers, Herve A. Besaucele, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov +14 more | 2000-10-03 |
| 6061129 | Compact high resolution grating spectrometer | Alexander I. Ershov, Palash P. Das | 2000-05-09 |