Issued Patents All Time
Showing 25 most recent of 164 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12389519 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodrigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2025-08-12 |
| 12369244 | Laser system for source material conditioning in an EUV light source | Yezheng Tao, Robert Jay Rafac | 2025-07-22 |
| 12287455 | Oxygen-loss resistant top coating for optical elements | Yue Ma, Marcus Adrianus Van De Kerkhof, Qiushi Zhu, Klaus Hummler, Peter Matthew Mayer +3 more | 2025-04-29 |
| 12171053 | System for monitoring a plasma | Michael A. Purvis, Klaus Hummler, Chengyuan Ding, Robert Jay Rafac | 2024-12-17 |
| 12078934 | Laser system for target metrology and alteration in an EUV light source | Robert Jay Rafac | 2024-09-03 |
| 11846887 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2023-12-19 |
| 11822252 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodreigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2023-11-21 |
| 11340532 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2022-05-24 |
| 11266002 | System for monitoring a plasma | Michael A. Purvis, Klaus Hummler, Chengyuan Ding, Robert Jay Rafac | 2022-03-01 |
| 10966308 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Daniel John William Brown | 2021-03-30 |
| 10955749 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodriges Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2021-03-23 |
| 10663866 | Wavelength-based optical filtering | Alexander Anthony Schafgans, Yezheng Tao, Rostislav Rokitski, Robert Jay Rafac, Daniel John William Brown +1 more | 2020-05-26 |
| 10635002 | Faceted EUV optical element | David C. Brandt, Alexander I. Ershov | 2020-04-28 |
| 10490313 | Method of controlling debris in an EUV light source | Alexander I. Ershov, John Tom Stewart, IV, Christianus W. J. Berendsen | 2019-11-26 |
| 10128017 | Apparatus for and method of controlling debris in an EUV light source | Alexander I. Ershov, John Tom Stewart, IV, Christianus W. J. Berendsen | 2018-11-13 |
| 9832852 | EUV LPP source with dose control and laser stabilization using variable width laser pulses | Robert Jay Rafac | 2017-11-28 |
| 9735535 | Drive laser for EUV light source | Alexander I. Ershov, Jerzy Hoffman, Norbert Bowering | 2017-08-15 |
| 9713239 | Laser produced plasma EUV light source | Bjorn Hansson, Alexander N. Bykanov, David C. Brandt | 2017-07-18 |
| 9669334 | Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material | William N. Partlo, Gregory O. Vaschenko, William Oldham | 2017-06-06 |
| 9541840 | Faceted EUV optical element | David C. Brandt, Alexander I. Ershov | 2017-01-10 |
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | Vladimir B. Fleurov, William N. Partlo, Alexander I. Ershov | 2016-12-06 |
| 9462668 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Daniel John William Brown, Daniel J. Golich | 2016-10-04 |
| 9390827 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Daniel John William Brown | 2016-07-12 |
| 9167679 | Beam position control for an extreme ultraviolet light source | Vladimir B. Fleurov | 2015-10-20 |
| 9155179 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Daniel John William Brown, Daniel J. Golich | 2015-10-06 |