| 12287455 |
Oxygen-loss resistant top coating for optical elements |
Yue Ma, Marcus Adrianus Van De Kerkhof, Qiushi Zhu, Klaus Hummler, Peter Matthew Mayer +3 more |
2025-04-29 |
| 12245350 |
Optical isolation module |
Yezheng Tao, Alexander Anthony Schafgans, Palash P. Das |
2025-03-04 |
| 11553582 |
Optical isolation module |
Yezheng Tao, Alexander Anthony Schafgans, Palash P. Das |
2023-01-10 |
| 10966308 |
EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods |
William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov |
2021-03-30 |
| 10667377 |
Extreme ultraviolet light source |
Robert Jay Rafac, Richard L. Sandstrom, Kai-Chung Hou |
2020-05-26 |
| 10663866 |
Wavelength-based optical filtering |
Alexander Anthony Schafgans, Igor V. Fomenkov, Yezheng Tao, Rostislav Rokitski, Robert Jay Rafac +1 more |
2020-05-26 |
| 10645789 |
Optical isolation module |
Yezheng Tao, Alexander Anthony Schafgans, Palash P. Das |
2020-05-05 |
| 9832855 |
Optical isolation module |
Yezheng Tao, Alexander Anthony Schafgans, Palash P. Das |
2017-11-28 |
| 9462668 |
Target for extreme ultraviolet light source |
Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel J. Golich |
2016-10-04 |
| 9390827 |
EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods |
William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov |
2016-07-12 |
| 9380691 |
Adaptive laser system for an extreme ultraviolet light source |
Yezheng Tao, Alexander Anthony Schafgans, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom +1 more |
2016-06-28 |
| 9232623 |
Extreme ultraviolet light source |
Robert Jay Rafac, Richard L. Sandstrom, Kai-Chung Hou |
2016-01-05 |
| 9155179 |
Target for extreme ultraviolet light source |
Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel J. Golich |
2015-10-06 |
| 8995080 |
Non-destructive detection of slider contamination |
James J. Mou, Robert German |
2015-03-31 |
| 8958143 |
Master oscillator—power amplifier drive laser with pre-pulse for EUV light source |
Kai-Chung Hou, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov |
2015-02-17 |
| 8912514 |
Target for extreme ultraviolet light source |
Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel J. Golich |
2014-12-16 |
| 8866110 |
Extreme ultraviolet light source |
Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov |
2014-10-21 |
| 8791440 |
Target for extreme ultraviolet light source |
Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel J. Golich |
2014-07-29 |
| 7561379 |
Laminated return pole for suppressing side track erasure |
Shaoping Li, Lei Wang, Chunhong Hou, Song S. Xue |
2009-07-14 |
| 7474499 |
Shielded enclosure of a disc drive for reducing penetration and influence of stray fields |
Shaoping Li, Michael Montemorra, Nurul Amin |
2009-01-06 |
| 6483300 |
Spin-stand having a disc heater |
Gregg J. Severson, James H. McGlennen, Thomas S. Rasmussen |
2002-11-19 |
| 6175583 |
Metal vapour laser |
James Austin Piper, Robert John Carman, Michael Withford |
2001-01-16 |