Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9462668 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown | 2016-10-04 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Yezheng Tao, Daniel John William Brown, Alexander Anthony Schafgans, Michael David Caudill, Richard L. Sandstrom +1 more | 2016-06-28 |
| 9155179 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown | 2015-10-06 |
| 8912514 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown | 2014-12-16 |
| 8791440 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown | 2014-07-29 |