Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12369244 | Laser system for source material conditioning in an EUV light source | Igor V. Fomenkov, Robert Jay Rafac | 2025-07-22 |
| 12245350 | Optical isolation module | Daniel John William Brown, Alexander Anthony Schafgans, Palash P. Das | 2025-03-04 |
| 11553582 | Optical isolation module | Daniel John William Brown, Alexander Anthony Schafgans, Palash P. Das | 2023-01-10 |
| 10663866 | Wavelength-based optical filtering | Alexander Anthony Schafgans, Igor V. Fomenkov, Rostislav Rokitski, Robert Jay Rafac, Daniel John William Brown +1 more | 2020-05-26 |
| 10645789 | Optical isolation module | Daniel John William Brown, Alexander Anthony Schafgans, Palash P. Das | 2020-05-05 |
| 10064261 | Extreme ultraviolet light source | John Tom Stewart, IV, Jordan Jur, Daniel J. W. Brown, Alexander Anthony Schafgans, Jason Michael Arcand +1 more | 2018-08-28 |
| 9832855 | Optical isolation module | Daniel John William Brown, Alexander Anthony Schafgans, Palash P. Das | 2017-11-28 |
| 9826616 | Extreme ultraviolet light source utilizing a target of finite extent | John Tom Stewart, IV, Jordan Jur, Daniel J. W. Brown | 2017-11-21 |
| 9462668 | Target for extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich | 2016-10-04 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Daniel John William Brown, Alexander Anthony Schafgans, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom +1 more | 2016-06-28 |
| 9357625 | Extreme ultraviolet light source | John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown, Jason Michael Arcand +2 more | 2016-05-31 |
| 9338870 | Extreme ultraviolet light source | John Tom Stewart, IV, Daniel J. W. Brown | 2016-05-10 |
| 9232624 | Target for laser produced plasma extreme ultraviolet light source | Robert Jay Rafac | 2016-01-05 |
| 9155179 | Target for extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich | 2015-10-06 |
| 9107279 | Target for laser produced plasma extreme ultraviolet light source | Robert Jay Rafac | 2015-08-11 |
| 8927952 | Target for laser produced plasma extreme ultraviolet light source | Robert Jay Rafac | 2015-01-06 |
| 8912514 | Target for extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich | 2014-12-16 |
| 8872143 | Target for laser produced plasma extreme ultraviolet light source | Robert Jay Rafac | 2014-10-28 |
| 8866110 | Extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown | 2014-10-21 |
| 8791440 | Target for extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich | 2014-07-29 |
| 8680495 | Extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel J. W. Brown | 2014-03-25 |
| 8536549 | Light source employing laser-produced plasma | Mark S. Tillack | 2013-09-17 |