| 10064261 |
Extreme ultraviolet light source |
Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Alexander Anthony Schafgans, Jason Michael Arcand +1 more |
2018-08-28 |
| 9826616 |
Extreme ultraviolet light source utilizing a target of finite extent |
Yezheng Tao, John Tom Stewart, IV, Jordan Jur |
2017-11-21 |
| 9357625 |
Extreme ultraviolet light source |
Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Jason Michael Arcand +2 more |
2016-05-31 |
| 9338870 |
Extreme ultraviolet light source |
Yezheng Tao, John Tom Stewart, IV |
2016-05-10 |
| RE45957 |
Regenerative ring resonator |
Hong Ye, Richard L. Sandstrom, Rostislav Rokitski, Robert Jay Rafac |
2016-03-29 |
| 9018561 |
High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier |
Richard L. Sandstrom, Thomas Hoffmann, Jason ROBINSON, Craig W Unick |
2015-04-28 |
| 8982922 |
Very high power laser chamber optical improvements |
Hong Ye, Alex Ershov, Rajasekhar Rao, Slava Rokitski, Rong (Lauren) Liu +5 more |
2015-03-17 |
| 8908735 |
Laser system |
Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov |
2014-12-09 |
| 8680495 |
Extreme ultraviolet light source |
Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov |
2014-03-25 |
| 8653437 |
EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods |
William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov |
2014-02-18 |
| 8654438 |
Master oscillator-power amplifier drive laser with pre-pulse for EUV light source |
Kai-Chung Hou, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov |
2014-02-18 |
| 8462425 |
Oscillator-amplifier drive laser with seed protection for an EUV light source |
Kai-Chung Hou, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov |
2013-06-11 |
| 8295316 |
Method and system for managing light source operation |
Robert P. Akins, Richard L. Sandstrom, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen |
2012-10-23 |
| 8284815 |
Very high power laser chamber optical improvements |
Hong Ye, Alex Ershov, Rajasekhar Rao, Slava Rokitski, Rong (Lauren) Liu +5 more |
2012-10-09 |
| 8170078 |
Laser system |
Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Robert A. Bergstedt, Richard L. Sandstrom +1 more |
2012-05-01 |
| 8144740 |
Laser system |
William N. Partlo, Richard L. Sandstrom |
2012-03-27 |
| 8102889 |
Multi-chamber gas discharge laser bandwidth control through discharge timing |
Robert N. Jacques, William N. Partlo |
2012-01-24 |
| 8014432 |
Regenerative ring resonator |
Hong Ye, Richard L. Sandstrom, Slava Rokitski, Robert Jay Rafac |
2011-09-06 |
| 7999915 |
Laser system |
Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Robert A. Bergstedt, Ivan Lalovic |
2011-08-16 |
| 7995637 |
Gas discharge laser chamber |
Richard L. Sandstrom, William N. Partlo, Bryan Moosman, Tae Hoon Chung, Thomas Patrick Duffey +2 more |
2011-08-09 |
| 7920616 |
Laser system |
William N. Partlo, Richard L. Sandstrom |
2011-04-05 |
| 7885309 |
Laser system |
Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Robert A. Bergstedt, Richard L. Sandstrom +1 more |
2011-02-08 |
| 7830934 |
Multi-chamber gas discharge laser bandwidth control through discharge timing |
Robert N. Jacques, William N. Partlo |
2010-11-09 |
| 7822092 |
Laser system |
Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Robert A. Bergstedt |
2010-10-26 |
| 7778302 |
Laser system |
Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Robert A. Bergstedt |
2010-08-17 |