| 9832853 |
Alignment of light source focus |
Matthew R. Graham, William N. Partlo, Steven Chang |
2017-11-28 |
| 9374882 |
Final focus assembly for extreme ultraviolet light source |
Paul Alexander McKenzie, Paul Binun |
2016-06-21 |
| 9239268 |
Calibration of photoelectromagnetic sensor in a laser source |
Rong (Lauren) Liu, Robert Jay Rafac, David W. Myers, Paul Alexander McKenzie |
2016-01-19 |
| 9239269 |
Calibration of photoelectromagnetic sensor in a laser source |
Rong (Lauren) Liu, Robert Jay Rafac, David W. Myers, Paul Alexander McKenzie |
2016-01-19 |
| 9127981 |
System and method for return beam metrology with optical switch |
Matthew R. Graham, Steven Chang |
2015-09-08 |
| 8982922 |
Very high power laser chamber optical improvements |
Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel J. W. Brown, Slava Rokitski +5 more |
2015-03-17 |
| 8681427 |
System and method for separating a main pulse and a pre-pulse beam from a laser source |
Christopher Paul Pate, Jason Michael Arcand |
2014-03-25 |
| 8648999 |
Alignment of light source focus |
Matthew R. Graham, William N. Partlo, Steven Chang |
2014-02-11 |
| 8379687 |
Gas discharge laser line narrowing module |
Raymond F. Cybulski, William N. Partlo, Richard L. Sandstrom, Gon Wang |
2013-02-19 |
| 8284815 |
Very high power laser chamber optical improvements |
Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel J. W. Brown, Slava Rokitski +5 more |
2012-10-09 |
| 8173985 |
Beam transport system for extreme ultraviolet light source |
William N. Partlo, Igor V. Fomenkov, Nam-hyong Kim |
2012-05-08 |
| 8170078 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Richard L. Sandstrom +1 more |
2012-05-01 |
| 8126027 |
Line narrowing module |
J. Martin Algots, William N. Partlo, German E. Rylov, Richard L. Sandstrom |
2012-02-28 |
| 7999915 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Ivan Lalovic |
2011-08-16 |
| 8000212 |
Metrology for extreme ultraviolet light source |
Vahan Senekerimyan, Nam-hyong Kim, Igor V. Fomenkov, William N. Partlo |
2011-08-16 |
| 7885309 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Richard L. Sandstrom +1 more |
2011-02-08 |
| 7822092 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov |
2010-10-26 |
| 7778302 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov |
2010-08-17 |
| 7746913 |
Laser system |
Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov |
2010-06-29 |
| 7653095 |
Active bandwidth control for a laser |
Daniel J. Reiley, German E. Rylov |
2010-01-26 |
| 7643528 |
Immersion lithography laser light source with pulse stretcher |
William N. Partlo, Alexander I. Ershov, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown +11 more |
2010-01-05 |
| 7366219 |
Line narrowing module |
J. Martin Algots, Walter Dale Gillespie, Vladimir Kulgeyko, William N. Partlo, German E. Rylov +3 more |
2008-04-29 |
| 6154259 |
Multi-beam laser scanning display system with speckle elimination |
David E. Hargis, Charles G. Fink, Graham W. Flint |
2000-11-28 |