Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12369244 | Laser system for source material conditioning in an EUV light source | Igor V. Fomenkov, Yezheng Tao | 2025-07-22 |
| 12238848 | EUV light source target metrology | — | 2025-02-25 |
| 12171053 | System for monitoring a plasma | Michael A. Purvis, Klaus Hummler, Chengyuan Ding, Igor V. Fomenkov | 2024-12-17 |
| 12078934 | Laser system for target metrology and alteration in an EUV light source | Igor V. Fomenkov | 2024-09-03 |
| 11758639 | Determining moving properties of a target in an extreme ultraviolet light source | — | 2023-09-12 |
| 11266002 | System for monitoring a plasma | Michael A. Purvis, Klaus Hummler, Chengyuan Ding, Igor V. Fomenkov | 2022-03-01 |
| 11096266 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2021-08-17 |
| 10904993 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | John Tom Stewart, IV, Andrew David LaForge | 2021-01-26 |
| 10674591 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2020-06-02 |
| 10667377 | Extreme ultraviolet light source | Richard L. Sandstrom, Daniel John William Brown, Kai-Chung Hou | 2020-05-26 |
| 10663866 | Wavelength-based optical filtering | Alexander Anthony Schafgans, Igor V. Fomenkov, Yezheng Tao, Rostislav Rokitski, Daniel John William Brown +1 more | 2020-05-26 |
| 10401704 | Compensating for a physical effect in an optical system | — | 2019-09-03 |
| 10349509 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | John Tom Stewart, IV, Andrew David LaForge | 2019-07-09 |
| 10314153 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2019-06-04 |
| 9980359 | Systems and methods for controlling EUV energy generation using pulse intensity | Daniel Jason Riggs | 2018-05-22 |
| 9832854 | Systems and methods for stabilization of droplet-plasma interaction via laser energy modulation | Daniel Jason Riggs | 2017-11-28 |
| 9832852 | EUV LPP source with dose control and laser stabilization using variable width laser pulses | Igor V. Fomenkov | 2017-11-28 |
| 9820368 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2017-11-14 |
| 9709897 | Polarization control of pulsed light beam | Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Ivan Lalovic | 2017-07-18 |
| 9713240 | Stabilizing EUV light power in an extreme ultraviolet light source | Daniel Jason Riggs | 2017-07-18 |
| 9516729 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Kevin W. Zhang, Michael A. Purvis, Alexander Anthony Schafgans | 2016-12-06 |
| 9462668 | Target for extreme ultraviolet light source | Yezheng Tao, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich | 2016-10-04 |
| 9426872 | System and method for controlling source laser firing in an LPP EUV light source | Daniel Jason Riggs | 2016-08-23 |
| RE45957 | Regenerative ring resonator | Hong Ye, Richard L. Sandstrom, Rostislav Rokitski, Daniel J. W. Brown | 2016-03-29 |
| 9239268 | Calibration of photoelectromagnetic sensor in a laser source | Rong (Lauren) Liu, David W. Myers, Robert A. Bergstedt, Paul Alexander McKenzie | 2016-01-19 |