Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171053 | System for monitoring a plasma | Klaus Hummler, Chengyuan Ding, Robert Jay Rafac, Igor V. Fomenkov | 2024-12-17 |
| 11266002 | System for monitoring a plasma | Klaus Hummler, Chengyuan Ding, Robert Jay Rafac, Igor V. Fomenkov | 2022-03-01 |
| 10210963 | Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber | Vahan Senekerimyan, Jie Ding | 2019-02-19 |
| 9546901 | Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules | Vahan Senekerimyan, Jie Ding | 2017-01-17 |
| 9516729 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Kevin W. Zhang, Robert Jay Rafac, Alexander Anthony Schafgans | 2016-12-06 |
| 9357625 | Extreme ultraviolet light source | Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown +2 more | 2016-05-31 |