Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12389519 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodrigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2025-08-12 |
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2025-01-07 |
| 11822252 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodreigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2023-11-21 |
| 11347154 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2022-05-31 |
| 10955749 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodriges Nunes, Alexander I. Ershov, Kornelis Frits Feenstra +13 more | 2021-03-23 |
| 10904993 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | Robert Jay Rafac, Andrew David LaForge | 2021-01-26 |
| 10490313 | Method of controlling debris in an EUV light source | Alexander I. Ershov, Igor V. Fomenkov, Christianus W. J. Berendsen | 2019-11-26 |
| 10349509 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | Robert Jay Rafac, Andrew David LaForge | 2019-07-09 |
| 10128017 | Apparatus for and method of controlling debris in an EUV light source | Alexander I. Ershov, Igor V. Fomenkov, Christianus W. J. Berendsen | 2018-11-13 |
| 10064261 | Extreme ultraviolet light source | Yezheng Tao, Jordan Jur, Daniel J. W. Brown, Alexander Anthony Schafgans, Jason Michael Arcand +1 more | 2018-08-28 |
| 9826616 | Extreme ultraviolet light source utilizing a target of finite extent | Yezheng Tao, Jordan Jur, Daniel J. W. Brown | 2017-11-21 |
| 9357625 | Extreme ultraviolet light source | Yezheng Tao, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown, Jason Michael Arcand +2 more | 2016-05-31 |
| 9338870 | Extreme ultraviolet light source | Yezheng Tao, Daniel J. W. Brown | 2016-05-10 |
| 9191384 | Maintaining privacy in a multi-tenant cloud service participating in a federated identity platform | Shrenik Dedhia | 2015-11-17 |
| 8375065 | Method for cataloging and storing data in a control system | Michael Soemo, Mark B. Gagner, Phil Pollock | 2013-02-12 |
| 8121994 | Partially embedded database and an embedded database manager for a control system | Michael Soemo, Mark B. Gagner, Phil Pollock | 2012-02-21 |
| 7644093 | Partially embedded database and an embedded database manager for a control system | Michael Soemo, Mark B. Gagner, Phil Pollock | 2010-01-05 |
| 7072879 | Partially embedded database and an embedded database manager for a control system | Michael Soemo, Mark B. Gagner, Phil Pollock | 2006-07-04 |
| 5743241 | Nitrous oxide plate system | John M. Wood | 1998-04-28 |
| 5699776 | Nozzle for mixing oxidizer with fuel | John M. Wood | 1997-12-23 |
| 4382544 | Energy management system with programmable thermostat | — | 1983-05-10 |