Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490313 | Method of controlling debris in an EUV light source | Alexander I. Ershov, John Tom Stewart, IV, Igor V. Fomenkov | 2019-11-26 |
| 10128017 | Apparatus for and method of controlling debris in an EUV light source | Alexander I. Ershov, John Tom Stewart, IV, Igor V. Fomenkov | 2018-11-13 |
| 9201059 | Microfluidic system and a method of performing a test | Niels Kristian Bau-Madsen, Jacques Jonsmann, Bent Overby | 2015-12-01 |