Issued Patents All Time
Showing 1–25 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12389519 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodrigues Nunes, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more | 2025-08-12 |
| 12222050 | Robust fluid coupling apparatus | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Vikas Giridhar Telkar, Theodorus Wilhelmus Driessen, Serkan Kincal | 2025-02-11 |
| 11846887 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2023-12-19 |
| 11822252 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodreigues Nunes, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more | 2023-11-21 |
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Bob Rollinger, Georgiy O. Vaschenko, Chirag Rajyaguru, Joshua Mark Lukens, Mathew Abraham | 2023-06-27 |
| 11474440 | Method of and apparatus for in-situ repair of reflective optic | — | 2022-10-18 |
| 11340532 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2022-05-24 |
| 10955749 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodriges Nunes, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more | 2021-03-23 |
| 10681795 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2020-06-09 |
| 10635002 | Faceted EUV optical element | David C. Brandt, Igor V. Fomenkov | 2020-04-28 |
| 10493504 | Apparatus for and method of active cleaning of EUV optic with RF plasma field | — | 2019-12-03 |
| 10490313 | Method of controlling debris in an EUV light source | John Tom Stewart, IV, Igor V. Fomenkov, Christianus W. J. Berendsen | 2019-11-26 |
| 10237960 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2019-03-19 |
| 10185234 | Harsh environment optical element protection | Norbert Bowering, Bruno La Fontaine, Silvia De Dea | 2019-01-22 |
| 10128017 | Apparatus for and method of controlling debris in an EUV light source | John Tom Stewart, IV, Igor V. Fomenkov, Christianus W. J. Berendsen | 2018-11-13 |
| 9844804 | Light collector mirror carrier | Silvia De Dea, Michael Varga, Robert L. Morse | 2017-12-19 |
| 9795023 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2017-10-17 |
| 9735535 | Drive laser for EUV light source | Jerzy Hoffman, Norbert Bowering, Igor V. Fomenkov | 2017-08-15 |
| 9693440 | EUV LPP source with improved dose control by tracking dose over specified window | — | 2017-06-27 |
| 9557650 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9560730 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9541840 | Faceted EUV optical element | David C. Brandt, Igor V. Fomenkov | 2017-01-10 |
| 9541838 | Method of temperature compensation in high power focusing system for EUV LPP source | — | 2017-01-10 |
| 9539622 | Apparatus for and method of active cleaning of EUV optic with RF plasma field | — | 2017-01-10 |
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | Vladimir B. Fleurov, William N. Partlo, Igor V. Fomenkov | 2016-12-06 |