| 9735535 |
Drive laser for EUV light source |
Alexander I. Ershov, Norbert Bowering, Igor V. Fomenkov |
2017-08-15 |
| 8514486 |
Drive laser for EUV light source |
Alexander I. Ershov, Igor V. Fomenkov, Norbert Bowering |
2013-08-20 |
| 8304752 |
EUV light producing system and method utilizing an alignment laser |
Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Jason Paxton, Nam-hyong Kim |
2012-11-06 |
| 7518787 |
Drive laser for EUV light source |
Alexander N. Bykanov, Igor V. Fomenkov, William N. Partlo |
2009-04-14 |
| 7402825 |
LPP EUV drive laser input system |
Rodney D. Simmons, John Viatella, R. Kyle Webb, Alexander N. Bykanov, Oleh Khodykin |
2008-07-22 |
| 7394083 |
Systems and methods for EUV light source metrology |
Norbert Bowering |
2008-07-01 |
| 7368741 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2008-05-06 |
| 7217941 |
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source |
Curtis Rettig, Ernesto L. Vargas |
2007-05-15 |
| 6972421 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2005-12-06 |
| 6414577 |
Core with coils and permanent magnet for switching DC relays, RF microwave switches, and other switching applications |
— |
2002-07-02 |
| 6005459 |
Switching device |
— |
1999-12-21 |
| 5815057 |
Electronically controlled switching device |
John L. Wenger |
1998-09-29 |
| 5546063 |
Magnetic field solenoid |
— |
1996-08-13 |
| 5272458 |
Solenoid actuator |
Krzysztof J. Ciezarek |
1993-12-21 |
| 4978935 |
Electromagnetic relay |
Krzysztof J. Ciezarek |
1990-12-18 |
| 4908588 |
Matrix switch |
Krzysztof J. Ciezarek |
1990-03-13 |
| 4795994 |
Electromechanical DC-RF relay |
— |
1989-01-03 |
| 4749967 |
High frequency electrical switch |
George J. Maculewicz, Robert A. Sznuk |
1988-06-07 |
| 4697056 |
Multiposition microwave switch with extended operational frequency range |
— |
1987-09-29 |
| 4646043 |
Solenoid having a plunger non-fixedly adjoining an end of the armature |
— |
1987-02-24 |
| 4392398 |
Wire trimmer |
— |
1983-07-12 |
| 4298847 |
Multiposition microwave switch with independent termination |
— |
1981-11-03 |
| 4260159 |
Electronic roulette game |
— |
1981-04-07 |