Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11215736 | EUV optical element having blister-resistant multilayer cap | — | 2022-01-04 |
| 10185234 | Harsh environment optical element protection | Alexander I. Ershov, Bruno La Fontaine, Silvia De Dea | 2019-01-22 |
| 9735535 | Drive laser for EUV light source | Alexander I. Ershov, Jerzy Hoffman, Igor V. Fomenkov | 2017-08-15 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart | 2017-04-25 |
| 9392678 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart | 2016-07-12 |
| 8907310 | EUV optics | Igor V. Fomenkov | 2014-12-09 |
| 8686370 | EUV light source components and methods for producing, using and refurbishing same | Oleh Khodykin | 2014-04-01 |
| 8598549 | EUV optics | Igor V. Fomenkov | 2013-12-03 |
| 8514486 | Drive laser for EUV light source | Alexander I. Ershov, Igor V. Fomenkov, Jerzy Hoffman | 2013-08-20 |
| 8314398 | EUV light source components and methods for producing, using and refurbishing same | Igor V. Fomenkov, Oleh Khodykin, Alexander N. Bykanov | 2012-11-20 |
| 8198612 | Systems and methods for heating an EUV collector mirror | Juan Armando Chavez | 2012-06-12 |
| 8035092 | Laser produced plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, Alexander I. Ershov, Oleh Khodykin | 2011-10-11 |
| 7960701 | EUV light source components and methods for producing, using and refurbishing same | Oleh Khodykin | 2011-06-14 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander N. Bykanov, David C. Brandt, Alexander I. Ershov, Rodney D. Simmons +2 more | 2011-01-18 |
| 7843632 | EUV optics | — | 2010-11-30 |
| 7732793 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | Alexander I. Ershov, William Marx, Bjorn Hansson, Oleh Khodykin, Igor V. Fomenkov | 2010-06-08 |
| 7671349 | Laser produced plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt, Alexander I. Ershov, Oleh Khodykin +1 more | 2010-03-02 |
| 7598509 | Laser produced plasma EUV light source | Alexander I. Ershov, William N. Partlo, Bjorn Hansson | 2009-10-06 |
| 7589337 | LPP EUV plasma source material target delivery system | Alexander N. Bykanov, J. Martin Algots, Oleh Khodykin, Oscar Hemberg | 2009-09-15 |
| 7525111 | High repetition rate laser produced plasma EUV light source | — | 2009-04-28 |
| 7465946 | Alternative fuels for EUV light source | Oleh Khodykin, Alexander N. Bykanov, Igor V. Fomenkov | 2008-12-16 |
| 7453077 | EUV light source | Bjorn Hansson, Rodney D. Simmons | 2008-11-18 |
| 7394083 | Systems and methods for EUV light source metrology | Jerzy Hoffman | 2008-07-01 |
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2008-05-06 |
| 7365351 | Systems for protecting internal components of a EUV light source from plasma-generated debris | Bjorn Hansson | 2008-04-29 |