| 11215736 |
EUV optical element having blister-resistant multilayer cap |
— |
2022-01-04 |
$116,419,000 |
| 10185234 |
Harsh environment optical element protection |
Alexander I. Ershov, Bruno La Fontaine, Silvia De Dea |
2019-01-22 |
$15,941,000 |
| 9735535 |
Drive laser for EUV light source |
Alexander I. Ershov, Jerzy Hoffman, Igor V. Fomenkov |
2017-08-15 |
$16,168,000 |
| 9632418 |
Target material supply apparatus for an extreme ultraviolet light source |
Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart |
2017-04-25 |
$3,723,000 |
| 9392678 |
Target material supply apparatus for an extreme ultraviolet light source |
Silvia De Dea, Georgiy O. Vaschenko, Peter Michael Baumgart |
2016-07-12 |
$8,748,000 |
| 8907310 |
EUV optics |
Igor V. Fomenkov |
2014-12-09 |
$6,299,000 |
| 8686370 |
EUV light source components and methods for producing, using and refurbishing same |
Oleh Khodykin |
2014-04-01 |
|
| 8598549 |
EUV optics |
Igor V. Fomenkov |
2013-12-03 |
|
| 8514486 |
Drive laser for EUV light source |
Alexander I. Ershov, Igor V. Fomenkov, Jerzy Hoffman |
2013-08-20 |
|
| 8314398 |
EUV light source components and methods for producing, using and refurbishing same |
Igor V. Fomenkov, Oleh Khodykin, Alexander N. Bykanov |
2012-11-20 |
$33,148,000 |
| 8198612 |
Systems and methods for heating an EUV collector mirror |
Juan Armando Chavez |
2012-06-12 |
$5,972,000 |
| 8035092 |
Laser produced plasma EUV light source |
Alexander N. Bykanov, Igor V. Fomenkov, Alexander I. Ershov, Oleh Khodykin |
2011-10-11 |
$10,979,000 |
| 7960701 |
EUV light source components and methods for producing, using and refurbishing same |
Oleh Khodykin |
2011-06-14 |
$10,681,000 |
| 7872245 |
Systems and methods for target material delivery in a laser produced plasma EUV light source |
Georgiy O. Vaschenko, Alexander N. Bykanov, David C. Brandt, Alexander I. Ershov, Rodney D. Simmons +2 more |
2011-01-18 |
$9,077,000 |
| 7843632 |
EUV optics |
— |
2010-11-30 |
$7,387,000 |
| 7732793 |
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source |
Alexander I. Ershov, William Marx, Bjorn Hansson, Oleh Khodykin, Igor V. Fomenkov |
2010-06-08 |
$2,725,000 |
| 7671349 |
Laser produced plasma EUV light source |
Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt, Alexander I. Ershov, Oleh Khodykin +1 more |
2010-03-02 |
$6,733,000 |
| 7598509 |
Laser produced plasma EUV light source |
Alexander I. Ershov, William N. Partlo, Bjorn Hansson |
2009-10-06 |
$9,096,000 |
| 7589337 |
LPP EUV plasma source material target delivery system |
Alexander N. Bykanov, J. Martin Algots, Oleh Khodykin, Oscar Hemberg |
2009-09-15 |
$9,887,000 |
| 7525111 |
High repetition rate laser produced plasma EUV light source |
— |
2009-04-28 |
$8,116,000 |
| 7465946 |
Alternative fuels for EUV light source |
Oleh Khodykin, Alexander N. Bykanov, Igor V. Fomenkov |
2008-12-16 |
$7,304,000 |
| 7453077 |
EUV light source |
Bjorn Hansson, Rodney D. Simmons |
2008-11-18 |
$7,001,000 |
| 7394083 |
Systems and methods for EUV light source metrology |
Jerzy Hoffman |
2008-07-01 |
$8,165,000 |
| 7368741 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2008-05-06 |
$2,697,000 |
| 7365351 |
Systems for protecting internal components of a EUV light source from plasma-generated debris |
Bjorn Hansson |
2008-04-29 |
$2,658,000 |
