Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635002 | Faceted EUV optical element | Alexander I. Ershov, Igor V. Fomenkov | 2020-04-28 |
| 9713239 | Laser produced plasma EUV light source | Bjorn Hansson, Alexander N. Bykanov, Igor V. Fomenkov | 2017-07-18 |
| 9541840 | Faceted EUV optical element | Alexander I. Ershov, Igor V. Fomenkov | 2017-01-10 |
| 8198615 | Gas management system for a laser-produced-plasma EUV light source | Alexander N. Bykanov, Alexander I. Ershov, Igor V. Fomenkov | 2012-06-12 |
| 8138487 | System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber | Georgiy O. Vaschenko, William N. Partlo, Igor V. Fomenkov, Richard L. Sandstrom, Alexander I. Ershov +1 more | 2012-03-20 |
| 7872245 | Systems and methods for target material delivery in a laser produced plasma EUV light source | Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, Alexander I. Ershov, Rodney D. Simmons +2 more | 2011-01-18 |
| 7812329 | System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus | Alexander N. Bykanov, Igor V. Fomenkov, William N. Partlo | 2010-10-12 |
| 7671349 | Laser produced plasma EUV light source | Alexander N. Bykanov, Norbert Bowering, Igor V. Fomenkov, Alexander I. Ershov, Oleh Khodykin +1 more | 2010-03-02 |
| 7655925 | Gas management system for a laser-produced-plasma EUV light source | Alexander N. Bykanov, Alexander I. Ershov, Igor V. Fomenkov | 2010-02-02 |
| 5807087 | Stator assembly for a progressing cavity pump | Gene Ray Neil Fulbright | 1998-09-15 |