Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12273986 | Target delivery system | Bob Rollinger | 2025-04-08 |
| 11856681 | Target delivery system | Bob Rollinger | 2023-12-26 |
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Bob Rollinger, Chirag Rajyaguru, Alexander I. Ershov, Joshua Mark Lukens, Mathew Abraham | 2023-06-27 |
| 11448967 | Target formation apparatus | — | 2022-09-20 |
| 11317501 | Method of purifying target material for an EUV light source | Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2022-04-26 |
| 10904994 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent | 2021-01-26 |
| 10632505 | System method and apparatus for high pressure liquid jet cleaning of sintered filters | Armin Bernhard Ridinger, Chirag Rajyaguru, Peter Michael Baumgart, Timothy Richard Palmer | 2020-04-28 |
| 10499485 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent | 2019-12-03 |
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Peter Michael Baumgart +4 more | 2019-11-19 |
| 10455680 | Method and apparatus for purifying target material for EUV light source | Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2019-10-22 |
| 9699876 | Method of and apparatus for supply and recovery of target material | Peter Michael Baumgart, Jeffrey Gacutan, Martin Algots, Theodosios Syrpis, Chirag Rajyaguru +1 more | 2017-07-04 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Peter Michael Baumgart, Norbert Bowering | 2017-04-25 |
| 9392678 | Target material supply apparatus for an extreme ultraviolet light source | Silvia De Dea, Peter Michael Baumgart, Norbert Bowering | 2016-07-12 |
| 9029813 | Filter for material supply apparatus of an extreme ultraviolet light source | Igor V. Fomenkov, William N. Partlo, William Oldham | 2015-05-12 |
| 8969840 | Droplet generator with actuator induced nozzle cleaning | Chirag Rajyaguru, Peter Michael Baumgart | 2015-03-03 |
| 8969838 | Systems and methods for protecting an EUV light source chamber from high pressure source material leaks | Krishna Ramadurai, Richard Charles Taddiken | 2015-03-03 |
| 8969839 | Laser produced plasma EUV light source | — | 2015-03-03 |
| 8829477 | Droplet generator with actuator induced nozzle cleaning | Chirag Rajyaguru, Peter Michael Baumgart | 2014-09-09 |
| 8748854 | Laser produced plasma EUV light source | — | 2014-06-10 |
| 8530871 | Laser produced plasma EUV light source | — | 2013-09-10 |
| 8513629 | Droplet generator with actuator induced nozzle cleaning | Chirag Rajyaguru, Peter Michael Baumgart | 2013-08-20 |
| 8319201 | Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave | — | 2012-11-27 |
| 8158960 | Laser produced plasma EUV light source | Alexander I. Ershov, Richard L. Sandstrom | 2012-04-17 |
| 8138487 | System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber | William N. Partlo, Igor V. Fomenkov, Richard L. Sandstrom, Alexander I. Ershov, David C. Brandt +1 more | 2012-03-20 |
| 7931850 | Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light | Carmen S. Menoni, Jorge J. Rocca, Scott Bloom, Erik H. Anderson, Weilun Chao +1 more | 2011-04-26 |