Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10232413 | Controlled fluid flow for cleaning an optical element | Chunguang Xia, Gregory J. Wilson, Brandon Wilson Verhoff | 2019-03-19 |
| 10185234 | Harsh environment optical element protection | Alexander I. Ershov, Norbert Bowering, Bruno La Fontaine | 2019-01-22 |
| 9844804 | Light collector mirror carrier | Michael Varga, Alexander I. Ershov, Robert L. Morse | 2017-12-19 |
| 9776218 | Controlled fluid flow for cleaning an optical element | Chunguang Xia, Gregory J. Wilson, Brandon Wilson Verhoff | 2017-10-03 |
| 9632418 | Target material supply apparatus for an extreme ultraviolet light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Norbert Bowering | 2017-04-25 |
| 9560730 | Transport system for an extreme ultraviolet light source | Alexander I. Ershov, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9557650 | Transport system for an extreme ultraviolet light source | Alexander I. Ershov, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9392678 | Target material supply apparatus for an extreme ultraviolet light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Norbert Bowering | 2016-07-12 |
| 9073098 | Light collector mirror cleaning | Michael Varga, Alexander I. Ershov, Robert L. Morse | 2015-07-07 |
| 9000404 | Systems and methods for optics cleaning in an EUV light source | Alexander N. Bykanov, Alexander I. Ershov, Vladimir B. Fleurov, Igor V. Fomenkov, William N. Partlo | 2015-04-07 |
| 8816305 | Filter for material supply apparatus | Sergei Kalynych, Peter Michael Baumgart | 2014-08-26 |
| 8633459 | Systems and methods for optics cleaning in an EUV light source | Alexander N. Bykanov, Alexander I. Ershov, Vladimir B. Fleurov, Igor V. Fomenkov, William N. Partlo | 2014-01-21 |