Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516730 | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source | William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov | 2016-12-06 |
| 9271381 | Methods and apparatus for laser produced plasma EUV light source | — | 2016-02-23 |
| 9167679 | Beam position control for an extreme ultraviolet light source | Igor V. Fomenkov | 2015-10-20 |
| 9148941 | Thermal monitor for an extreme ultraviolet light source | Igor V. Fomenkov, Shailendra Srivastava | 2015-09-29 |
| 9000404 | Systems and methods for optics cleaning in an EUV light source | Alexander N. Bykanov, Silvia De Dea, Alexander I. Ershov, Igor V. Fomenkov, William N. Partlo | 2015-04-07 |
| 9000405 | Beam position control for an extreme ultraviolet light source | Igor V. Fomenkov | 2015-04-07 |
| 8855166 | 6 KHz and above gas discharge laser system | Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Frederick Palenschat, Walter Dale Gillespie +4 more | 2014-10-07 |
| 8633459 | Systems and methods for optics cleaning in an EUV light source | Alexander N. Bykanov, Silvia De Dea, Alexander I. Ershov, Igor V. Fomenkov, William N. Partlo | 2014-01-21 |
| 7643528 | Immersion lithography laser light source with pulse stretcher | William N. Partlo, Alexander I. Ershov, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown +11 more | 2010-01-05 |
| 6904073 | High power deep ultraviolet laser with long life optics | Thomas A. Yager, William N. Partio, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior +11 more | 2005-06-07 |
| 6757316 | Four KHz gas discharge laser | Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher +14 more | 2004-06-29 |
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Jean-Marc Hueber, Alexander I. Ershov, Thomas Hofmann | 2003-04-22 |
| 6466602 | Gas discharge laser long life electrodes | Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko, Jean-Marc Hueber +4 more | 2002-10-15 |
| 6317447 | Electric discharge laser with acoustic chirp correction | William N. Partlo, Igor V. Fomenkov, Jean-Marc Hueber, Zsolt Bor, Eckehard D. Onkels +3 more | 2001-11-13 |