FP

Frederick Palenschat

CY Cymer: 5 patents #91 of 339Top 30%
Overall (All Time): #1,010,798 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8855166 6 KHz and above gas discharge laser system Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Vladimir B. Fleurov, Walter Dale Gillespie +4 more 2014-10-07
7087914 High repetition rate laser produced plasma EUV light source Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, John M. Algots +2 more 2006-08-08
6914919 Six to ten KHz, or greater gas discharge laser system Tom A. Watson, Richard C. Ujazdowski, Alex P. Ivaschenko, Richard L. Sandstrom, Robert A. Shannon +6 more 2005-07-05
6650666 Laser wavelength control unit with piezoelectric driver Ronald Spangler, Robert N. Jacques, John Allen Rule, Igor V. Fomenkov, John M. Algots +2 more 2003-11-18
6532247 Laser wavelength control unit with piezoelectric driver Ronald Spangler, Robert N. Jacques, George J. Everage, Stuart L. Anderson, Igor V. Fomenkov +4 more 2003-03-11