Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374853 | Control system for a plurality of deep ultraviolet optical oscillators | Yingbo Zhao, Joshua Jon Thornes, Thomas Patrick Duffey, Eric Anders Mason | 2025-07-29 |
| 11949202 | Gas management system | Yzzer Roman Gutierrez, Edward Siqi Luo, Dinesh Kanawade | 2024-04-02 |
| 11949203 | Gas management system | Yzzer Roman Gutierrez, Edward Siqi Luo, Dinesh Kanawade | 2024-04-02 |
| 11777271 | Method of and apparatus for extending electrode life in a laser chamber | Thomas Patrick Duffey, Paul C. Melcher | 2023-10-03 |
| 11614012 | Nonwoven screens for dust trapping in laser discharge chambers | Ulrich Niemann | 2023-03-28 |
| 10074953 | Erosion resistant electrodes for use in generating gas discharge laser | Siqi Luo, Richard C. Ujazdowski, Thomas Patrick Duffey | 2018-09-11 |
| 9620920 | High pulse repetition rate gas discharge laser | Thomas D. Steiger, Richard C. Ujazdowski, William N. Partlo | 2017-04-11 |
| 8855166 | 6 KHz and above gas discharge laser system | Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Vladimir B. Fleurov, Frederick Palenschat +4 more | 2014-10-07 |
| 7653112 | Line narrowing module | Brian Strate | 2010-01-26 |
| 7633989 | High pulse repetition rate gas discharge laser | Thomas D. Steiger, Richard C. Ujazdowski, William N. Partlo | 2009-12-15 |
| 7535948 | Cathodes for fluorine gas discharge lasers | Thomas D. Steiger, Joshua Brown, Thomas Patrick Duffey, Richard G. Morton | 2009-05-19 |
| 7522650 | Gas discharge laser chamber improvements | William N. Partlo, Yoshiho Amada, James A. Carmichael, Timothy Dyer, Bryan Moosman +6 more | 2009-04-21 |
| 7366219 | Line narrowing module | J. Martin Algots, Robert A. Bergstedt, Vladimir Kulgeyko, William N. Partlo, German E. Rylov +3 more | 2008-04-29 |
| 7301980 | Halogen gas discharge laser electrodes | Thomas D. Steiger, Richard C. Ujazdowski, Timothy Dyer, Thomas Patrick Duffey, Bryan Moosman +2 more | 2007-11-27 |
| 7230965 | Anodes for fluorine gas discharge lasers | Timothy Dyer, Richard G. Morton, Thomas D. Steiger | 2007-06-12 |
| 7132123 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson +3 more | 2006-11-07 |
| 6937635 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson +3 more | 2005-08-30 |
| 6904073 | High power deep ultraviolet laser with long life optics | Thomas A. Yager, William N. Partio, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior +11 more | 2005-06-07 |