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Conduit system, radiation source, lithographic apparatus, and methods thereof |
Edward Siqi Luo, Andrew Jay Effenberger, Jr., Mohammad Amin Khamehchi |
2025-06-24 |
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Reducing fretting corrosion in a gas discharge chamber support device |
— |
2024-10-22 |
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High pulse repetition rate gas discharge laser |
Walter Dale Gillespie, Richard C. Ujazdowski, William N. Partlo |
2017-04-11 |
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6 KHz and above gas discharge laser system |
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Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser |
Yoshiho Amada, Richard C. Ujazdowski |
2014-08-26 |
| 7633989 |
High pulse repetition rate gas discharge laser |
Walter Dale Gillespie, Richard C. Ujazdowski, William N. Partlo |
2009-12-15 |
| 7542502 |
Thermal-expansion tolerant, preionizer electrode for a gas discharge laser |
Richard C. Ujazdowski |
2009-06-02 |
| 7535948 |
Cathodes for fluorine gas discharge lasers |
Joshua Brown, Thomas Patrick Duffey, Walter Dale Gillespie, Richard G. Morton |
2009-05-19 |
| 7522650 |
Gas discharge laser chamber improvements |
William N. Partlo, Yoshiho Amada, James A. Carmichael, Timothy Dyer, Walter Dale Gillespie +6 more |
2009-04-21 |
| 7369596 |
Chamber for a high energy excimer laser source |
William N. Partlo |
2008-05-06 |
| 7301980 |
Halogen gas discharge laser electrodes |
Richard C. Ujazdowski, Timothy Dyer, Thomas Patrick Duffey, Walter Dale Gillespie, Bryan Moosman +2 more |
2007-11-27 |
| 7230965 |
Anodes for fluorine gas discharge lasers |
Timothy Dyer, Richard G. Morton, Walter Dale Gillespie |
2007-06-12 |
| 7132123 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Timothy Dyer, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more |
2006-11-07 |
| 7006547 |
Very high repetition rate narrow band gas discharge laser system |
Edward P. Holtaway, Bryan Moosman, Rajasekhar Rao |
2006-02-28 |
| 6937635 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Timothy Dyer, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more |
2005-08-30 |
| 6882674 |
Four KHz gas discharge laser system |
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2005-04-19 |
| 6690706 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Timothy Dyer, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +1 more |
2004-02-10 |
| 4894208 |
System for separating radioactive NA from Al |
Henry C. Griffin |
1990-01-16 |
