Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341314 | Conduit system, radiation source, lithographic apparatus, and methods thereof | Edward Siqi Luo, Andrew Jay Effenberger, Jr., Mohammad Amin Khamehchi | 2025-06-24 |
| 12125695 | Reducing fretting corrosion in a gas discharge chamber support device | — | 2024-10-22 |
| 9620920 | High pulse repetition rate gas discharge laser | Walter Dale Gillespie, Richard C. Ujazdowski, William N. Partlo | 2017-04-11 |
| 8855166 | 6 KHz and above gas discharge laser system | Richard C. Ujazdowski, Richard M. Ness, J. Martin Algots, Vladimir B. Fleurov, Frederick Palenschat +4 more | 2014-10-07 |
| 8814522 | Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser | Yoshiho Amada, Richard C. Ujazdowski | 2014-08-26 |
| 7633989 | High pulse repetition rate gas discharge laser | Walter Dale Gillespie, Richard C. Ujazdowski, William N. Partlo | 2009-12-15 |
| 7542502 | Thermal-expansion tolerant, preionizer electrode for a gas discharge laser | Richard C. Ujazdowski | 2009-06-02 |
| 7535948 | Cathodes for fluorine gas discharge lasers | Joshua Brown, Thomas Patrick Duffey, Walter Dale Gillespie, Richard G. Morton | 2009-05-19 |
| 7522650 | Gas discharge laser chamber improvements | William N. Partlo, Yoshiho Amada, James A. Carmichael, Timothy Dyer, Walter Dale Gillespie +6 more | 2009-04-21 |
| 7369596 | Chamber for a high energy excimer laser source | William N. Partlo | 2008-05-06 |
| 7301980 | Halogen gas discharge laser electrodes | Richard C. Ujazdowski, Timothy Dyer, Thomas Patrick Duffey, Walter Dale Gillespie, Bryan Moosman +2 more | 2007-11-27 |
| 7230965 | Anodes for fluorine gas discharge lasers | Timothy Dyer, Richard G. Morton, Walter Dale Gillespie | 2007-06-12 |
| 7132123 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more | 2006-11-07 |
| 7006547 | Very high repetition rate narrow band gas discharge laser system | Edward P. Holtaway, Bryan Moosman, Rajasekhar Rao | 2006-02-28 |
| 6937635 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more | 2005-08-30 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6690706 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +1 more | 2004-02-10 |
| 4894208 | System for separating radioactive NA from Al | Henry C. Griffin | 1990-01-16 |