Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10648148 | Sheet for use in ground works | — | 2020-05-12 |
| 8893702 | Ductile mode machining methods for hard and brittle components of plasma processing apparatuses | John F. Stumpf, David Allen Ruberg, Lihua Huang | 2014-11-25 |
| 8742604 | Systems and methods for combined flow control and electricity generation | Mark Richter, Rafael Andres Bañados Contreras, Chester Ledlie Sandberg | 2014-06-03 |
| 7851011 | Anodes for fluorine gas discharge lasers | — | 2010-12-14 |
| 7522650 | Gas discharge laser chamber improvements | William N. Partlo, Yoshiho Amada, James A. Carmichael, Walter Dale Gillespie, Bryan Moosman +6 more | 2009-04-21 |
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2008-05-06 |
| 7366219 | Line narrowing module | J. Martin Algots, Robert A. Bergstedt, Walter Dale Gillespie, Vladimir Kulgeyko, William N. Partlo +3 more | 2008-04-29 |
| 7339973 | Electrodes for fluorine gas discharge lasers | Richard G. Morton, Bryan Moosman, James A. Carmichael, Jiping Zhang | 2008-03-04 |
| 7301980 | Halogen gas discharge laser electrodes | Thomas D. Steiger, Richard C. Ujazdowski, Thomas Patrick Duffey, Walter Dale Gillespie, Bryan Moosman +2 more | 2007-11-27 |
| 7229343 | Orbiting indexable belt polishing station for chemical mechanical polishing | Saket Chadda, Clinton O. Fruitman | 2007-06-12 |
| 7230965 | Anodes for fluorine gas discharge lasers | Richard G. Morton, Walter Dale Gillespie, Thomas D. Steiger | 2007-06-12 |
| 7193228 | EUV light source optical elements | Norbert Bowering, Alexander I. Ershov, Hugh R. Grinolds | 2007-03-20 |
| 7132123 | High rep-rate laser with improved electrodes | Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more | 2006-11-07 |
| 7095774 | Cathodes for fluorine gas discharge lasers | Richard G. Morton | 2006-08-22 |
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2005-12-06 |
| 6937635 | High rep-rate laser with improved electrodes | Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more | 2005-08-30 |
| 6793565 | Orbiting indexable belt polishing station for chemical mechanical polishing | Saket Chadda, Clinton O. Fruitman | 2004-09-21 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |
| 6690706 | High rep-rate laser with improved electrodes | Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +1 more | 2004-02-10 |
| 6661826 | Laser chamber insulator with sealed electrode feedthrough | Richard C. Ujazdowski, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann | 2003-12-09 |
| 6652366 | Dynamic slurry distribution control for CMP | — | 2003-11-25 |
| 6540592 | Carrier head with reduced moment wear ring | Stephen C. Schultz, John D. Herb | 2003-04-01 |
| 6465051 | Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling | Turgut Sahin, Fred C. Redeker, Romuald Nowak, Shijian Li, Derek R. Witty | 2002-10-15 |
| 6447368 | Carriers with concentric balloons supporting a diaphragm | Clinton O. Fruitman | 2002-09-10 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |