| 10648148 |
Sheet for use in ground works |
— |
2020-05-12 |
|
| 8893702 |
Ductile mode machining methods for hard and brittle components of plasma processing apparatuses |
John F. Stumpf, David Allen Ruberg, Lihua Huang |
2014-11-25 |
$10,852,000 |
| 8742604 |
Systems and methods for combined flow control and electricity generation |
Mark Richter, Rafael Andres Bañados Contreras, Chester Ledlie Sandberg |
2014-06-03 |
$4,501,000 |
| 7851011 |
Anodes for fluorine gas discharge lasers |
— |
2010-12-14 |
$2,696,000 |
| 7522650 |
Gas discharge laser chamber improvements |
William N. Partlo, Yoshiho Amada, James A. Carmichael, Walter Dale Gillespie, Bryan Moosman +6 more |
2009-04-21 |
$8,496,000 |
| 7368741 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2008-05-06 |
$2,697,000 |
| 7366219 |
Line narrowing module |
J. Martin Algots, Robert A. Bergstedt, Walter Dale Gillespie, Vladimir Kulgeyko, William N. Partlo +3 more |
2008-04-29 |
$2,658,000 |
| 7339973 |
Electrodes for fluorine gas discharge lasers |
Richard G. Morton, Bryan Moosman, James A. Carmichael, Jiping Zhang |
2008-03-04 |
$7,297,000 |
| 7301980 |
Halogen gas discharge laser electrodes |
Thomas D. Steiger, Richard C. Ujazdowski, Thomas Patrick Duffey, Walter Dale Gillespie, Bryan Moosman +2 more |
2007-11-27 |
$9,510,000 |
| 7229343 |
Orbiting indexable belt polishing station for chemical mechanical polishing |
Saket Chadda, Clinton O. Fruitman |
2007-06-12 |
|
| 7230965 |
Anodes for fluorine gas discharge lasers |
Richard G. Morton, Walter Dale Gillespie, Thomas D. Steiger |
2007-06-12 |
$5,214,000 |
| 7193228 |
EUV light source optical elements |
Norbert Bowering, Alexander I. Ershov, Hugh R. Grinolds |
2007-03-20 |
$12,747,000 |
| 7132123 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more |
2006-11-07 |
$14,774,000 |
| 7095774 |
Cathodes for fluorine gas discharge lasers |
Richard G. Morton |
2006-08-22 |
$13,269,000 |
| 6972421 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2005-12-06 |
$12,112,000 |
| 6937635 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +3 more |
2005-08-30 |
$11,076,000 |
| 6793565 |
Orbiting indexable belt polishing station for chemical mechanical polishing |
Saket Chadda, Clinton O. Fruitman |
2004-09-21 |
|
| 6721162 |
Electrostatic chuck having composite dielectric layer and method of manufacture |
Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more |
2004-04-13 |
$29,327,000 |
| 6690706 |
High rep-rate laser with improved electrodes |
Richard G. Morton, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson, Bryan Moosman +1 more |
2004-02-10 |
$7,742,000 |
| 6661826 |
Laser chamber insulator with sealed electrode feedthrough |
Richard C. Ujazdowski, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann |
2003-12-09 |
$17,141,000 |
| 6652366 |
Dynamic slurry distribution control for CMP |
— |
2003-11-25 |
|
| 6540592 |
Carrier head with reduced moment wear ring |
Stephen C. Schultz, John D. Herb |
2003-04-01 |
|
| 6465051 |
Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling |
Turgut Sahin, Fred C. Redeker, Romuald Nowak, Shijian Li, Derek R. Witty |
2002-10-15 |
$18,888,000 |
| 6447368 |
Carriers with concentric balloons supporting a diaphragm |
Clinton O. Fruitman |
2002-09-10 |
$1,444,000 |
| 6414834 |
Dielectric covered electrostatic chuck |
Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more |
2002-07-02 |
$21,510,000 |
