| 10900123 |
Apparatus and method for controlled application of reactive vapors to produce thin films and coatings |
Boris Kobrin, Richard Yi, Jeffrey D. Chinn |
2021-01-26 |
|
| 10577691 |
Single ALD cycle thickness control in multi-station substrate deposition systems |
Hu Kang, Adrien LaVoie, Jun Qian |
2020-03-03 |
$44,545,000 |
| 9972583 |
Durable, heat-resistant multi-layer coatings and coated articles |
Boris Kobrin, Nikunj Dangaria, Michael T. Grimes |
2018-05-15 |
|
| 9797042 |
Single ALD cycle thickness control in multi-station substrate deposition systems |
Hu Kang, Adrien LaVoie, Jun Qian |
2017-10-24 |
$62,845,000 |
| 9725805 |
Apparatus and method for controlled application of reactive vapors to produce thin films and coatings |
Boris Kobrin, Richard Yi, Jeffrey D. Chinn |
2017-08-08 |
|
| 8987029 |
Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures |
Jeffrey D. Chinn, Boris Kobrin |
2015-03-24 |
|
| 8900695 |
Durable conformal wear-resistant carbon-doped metal oxide-comprising coating |
Boris Kobrin, Jeffrey D. Chinn |
2014-12-02 |
|
| 8545972 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer |
Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2013-10-01 |
|
| 8501277 |
Durable, heat-resistant multi-layer coatings and coated articles |
Boris Kobrin, Dangaria Nikunji Hirji, Michael T. Grimes |
2013-08-06 |
|
| 8323723 |
Controlled vapor deposition of biocompatible coatings for medical devices |
Michael D. Lowery, Laurent Hoffmann, Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2012-12-04 |
|
| 8298614 |
Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layers |
Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2012-10-30 |
|
| 8236379 |
Articles with super-hydrophobic and-or super-hydrophilic surfaces and method of formation |
Boris Kobrin, Jeffrey D. Chin, Benigno A. Janeiro |
2012-08-07 |
|
| 8178162 |
Controlled deposition of silicon-containing coatings adhered by an oxide layer |
Boris Kobrin, Richard Yi, Jeffrey D. Chinn |
2012-05-15 |
|
| 8067258 |
Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures |
Jeffrey D. Chinn, Boris Kobrin |
2011-11-29 |
|
| 7955704 |
Controlled vapor deposition of biocompatible coatings for medical devices |
Michael D. Lowery, Laurent Hoffmann, Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2011-06-07 |
|
| 7879396 |
High aspect ratio performance coatings for biological microfluidics |
Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2011-02-01 |
|
| 7776396 |
Controlled vapor deposition of multilayered coatings adhered by an oxide layer |
Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2010-08-17 |
|
| 7695775 |
Controlled vapor deposition of biocompatible coatings over surface-treated substrates |
Boris Kobrin, Jeffrey D. Chinn |
2010-04-13 |
|
| 7687110 |
Method of in-line purification of CVD reactive precursor materials |
Boris Kobrin, Jeffrey D. Chinn, Richard Yi |
2010-03-30 |
|
| 7638167 |
Controlled deposition of silicon-containing coatings adhered by an oxide layer |
Boris Kobrin, Richard Yi, Jeffrey D. Chinn |
2009-12-29 |
|
| 7413774 |
Method for controlled application of reactive vapors to produce thin films and coatings |
Boris Kobrin, Richard Yi, Jeffrey D. Chinn |
2008-08-19 |
|
| 6465051 |
Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling |
Turgut Sahin, Fred C. Redeker, Shijian Li, Timothy Dyer, Derek R. Witty |
2002-10-15 |
$18,888,000 |
| 6364995 |
Dome-shaped inductive coupling wall having a plurality of radii for an inductively coupled plasma reactor |
Kevin Fairbairn |
2002-04-02 |
$41,044,000 |
| 6220201 |
High density plasma CVD reactor with combined inductive and capacitive coupling |
Kevin Fairbairn, Fred C. Redeker |
2001-04-24 |
$56,824,000 |
| 6182602 |
Inductively coupled HDP-CVD reactor |
Fred C. Redeker, Tetsuya Ishikawa, Troy S. Detrick, Jay D. Pinson, II |
2001-02-06 |
$70,544,000 |
