Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6121161 | Reduction of mobile ion and metal contamination in HDP-CVD chambers using chamber seasoning film depositions | Kent Rossman, Turgut Sahin, Hichem M'Saad | 2000-09-19 |
| 6109206 | Remote plasma source for chamber cleaning | Dan Maydan, Ashok Sinha | 2000-08-29 |
| 5976308 | High density plasma CVD and etching reactor | Kevin Fairbairn | 1999-11-02 |
| 5865896 | High density plasma CVD reactor with combined inductive and capacitive coupling | Kevin Fairbairn, Fred C. Redeker | 1999-02-02 |
| 5614055 | High density plasma CVD and etching reactor | Kevin Fairbairn | 1997-03-25 |